רÀûÃû³Æ£º³ôÑõÆøÃôÔª¼þ¡¢¼ì²â×°Öúͼì²â·½·¨
¼¼ÊõÁìÓò£º
±¾·¢Ã÷Éæ¼°³ôÑõÆøÃôÔª¼þ¡¢¼ì²â×°Öúͼì²â·½·¨¡£
±³¾°¼¼Êõ£º
ĿǰNOX¡¢SPMºÍ¹â»¯Ñ§Ñõ»¯¼ÁÔì³É¿ÕÆøÎÛȾ£¬ÑÏÖØÓ°Ïì»·¾³¡£×÷Ϊ¹â»¯Ñ§Ñõ»¯¼ÁÖ÷Òª×é·ÖµÄ³ôÑõÊÇÔÚÑô¹âÕÕÉäϹ¤³§¡¢°ì¹«ÊÒºÍÆû³µÅŷŵÄÎÛȾÎïÈçNOX»òÌþ·¢Éú¹â»¯Ñ§·´Ó¦Éú³ÉµÄ¡£²¢ÇÒÔì³É¹â»¯Ñ§ÑÌÎí¡£
ÈÕ±¾ÒÑ¾ÖÆ¶¨ÁËÖÊÁ¿±ê×¼£¬Èç¹æ¶¨ÁË¿ÕÆøÖÐÕâЩÎïÖʵĹ⻯ѧÑõ»¯¼ÁµÄŨ¶È¡£ÆøÌåŨ¶ÈÊÇÔÚÐí¶àµØ·½µÄ³£¹æ¿ÕÆø¼ì²âÕ¾ÓÃÀûÓÃ×ÏÍâÏßÎüÊյķÖÎöÒDzⶨµÄ¡£¿ÕÆøÖÊÁ¿±ê×¼ÊÇÆ½¾ù60ppb/h»ò¸üµÍ¡£
ÔÚÓ÷ÖÎöÒDzâÁ¿ÆøÌåŨ¶Èʱ£¬Äܹ»²âÁ¿¼¸¸öppbµÄÉÙÁ¿ÆøÌå¡£µ«ÊÇ£¬ÕâÖÖÒÇÆ÷¼Û¸ñ°º¹óÇÒÐèҪά»¤¡£·ÖÎöÒÇÐèÒª·Ç³£¸ßµÄ¶¯Á¦·ÑÓá¢ÒÇÆ÷ά»¤³É±¾µÈ¡£»¹ÓÐÐí¶àÏÞÖÆ£¬±ØÐë±£Ö¤µçÔ´¡¢Ð£ÕýÓõıê×¼ÆøÌåºÍ¿ØÖÆÊª¶ÈµÄרÓ÷¿¼ä¡£
ΪÁ˸߾«¶ÈµØÑо¿ÆøÌåŨ¶È·Ö²¼£¬ÆÀ¼Û¶Ô½µØ»·¾³µÄÓ°Ï죬±ØÐëÔö¼Ó¼ì²âµãÒÔ¼ì²âÈ«¹ú·¶Î§ÄڵĻ·¾³¡£Îª´Ë£¬Ä¿Ç°ÈÕÒæÐèÒªÀÛ¼ÆÊ¹Óõͳɱ¾¡¢Ð¡ÐͺÍÒ×ÓÚʹÓÃµÄÆøÃôÔª¼þ»òÎÞÔ´¼ì²â·½·¨(»ò¼ì²â×°ÖÃ)¡£
ΪÁËÂú×ãÕâÒ»ÐèÒª£¬°ëµ¼Ì寸ÃôÔª¼þ¡¢¹ÌÌåµç½âÖÊÆøÃôÔª¼þ¡¢µç»¯Ñ§ÆøÃôÔª¼þ¡¢Ë®¾§Õñµ´ÆøÃôÔª¼þµÈµÃµ½¹ã·º¿ª·¢¡£µ«ÊÇ£¬ÕâЩ¿ª·¢µÄÆøÃôÔª¼þÓÃÓÚÆÀ¼Û¶Ìʱ¼äÄڵķ´Ó¦£¬ÕâÐ©ÆøÃôÔª¼þ²»ÄÜÓÃÓÚÐèÒªÀÛ¼ÆÊý¾ÝµÄ¼ì²â¡£Èç¹ûÐèÒªÀۼƣ¬ÔòÕâÐ©ÆøÃôÔª¼þ±ØÐëÒ»Ö±´¦ÓÚÔËÐÐ״̬¡£Æä¼ì²â¼«ÏÞÊÇ´Îppm(1ppm»ò¸üµÍ)£¬ÕâÐ©ÆøÃôÔª¼þ²»Äܼì²âʵ¼Ê»·¾³ÖеijôÑõŨ¶È(ÈçÔ¼10ppbµÄ³ôÑõ)¡£ÔÚÐí¶àÇé¿öϲ»ÄܺöÂÔÆäËüÆøÌåµÄÓ°Ïì¡£
»¹¿ª·¢ÁËÒ»ÖÖʹÓÃÎÞÔ´²ÉÑùÆ÷(passive sampler)µÄ·½·¨£¬ÓÃÓÚÔÚÒ»¸öµØµã½øÐг¤ÆÚƽ¾ù¼ì²â£¬¸Ã·½·¨²»ÊÊÓÚÀÛ¼ÆÓ¦Óá£ÕâÖÖ·½·¨´æÔÚµÄÎÊÌâÊDzÙ×÷Ô±±ØÐëµ½ÏÖ³¡£¬ÔÚ¶ÁÈ¡ÑÕɫʱ»¹´æÔÚ¸öÌå²îÒì¡£ÆäËüÆøÌåµÄ¸ÉÈÅ»ò±ä¶¯³£³£»á²úÉúһЩÎÊÌâ¡£
×÷ΪÎÞÔ´¼ì²â·½·¨£¬ÓóéÎü±Ã½«³ôÑõ²ÉÈëÓô¿¾»Ë®Ï´¾»µÄ²£Á§Æ¿£¬ÒÔ²»ºÍ¿ÕÆø»ìºÏ¡£½«Ë®ÖеijôÑõÎüÊÕµ½µâ»¯¼ØÈÜÒºÖУ¬µÎ¶¨³ÁµíµÄµâ¡£¸Ã·½·¨²»½öÐèÒªÑùÆ·£¬¶øÇÒÐèÒªÍâΧÉ豸£¬²¢ÇÒÔÚ²ÉË®ÑùºóÒªÁ¢¼´µ÷½ÚpH¡£»¹±ØÐë½øÐмì²â²Ù×÷¡£
ΪÁ˸ù¾Ý¿ÕÆøÖÊÁ¿±ê×¼¸ß¾«¶È¼ì²âppbÊýÁ¿¼¶µÄ³ôÑõÆøÌ壬´«Í³µÄÆøÌåŨ¶È¼ì²âÐèÒª°º¹óµÄ±¿ÖصÄÉ豸ÅäÖ᣼ì²â·½·¨ºÜÂé·³£¬ÇÒ³ôÑõÆøÌå²»Ò×¼ì²â¡£
·¢Ã÷ÄÚÈÝ
±¾·¢Ã÷µÄÒ»¸öÄ¿µÄÊÇÌṩÄܹ»±ÈÏÖÓм¼Êõ¸ü¼òÒ׸ü¾«È·µØ¼ì²â³ôÑõÆøÌåµÄ³ôÑõÆøÃôÔª¼þ¡¢¼ì²â×°ÖÃ(²âÁ¿×°ÖÃ)ºÍ¼ì²â·½·¨(²âÁ¿·½·¨)¡£
±¾·¢Ã÷µÄÁíÒ»¸öÄ¿µÄÊÇÌṩÄܹ»ÀÛ¼ÆÓ¦ÓõijôÑõÆøÃôÔª¼þ¡¢¼ì²â×°ÖÃ(²âÁ¿×°ÖÃ)ºÍ¼ì²â·½·¨(²âÁ¿·½·¨)¡£
±¾·¢Ã÷µÄÔÙÒ»¸öÄ¿µÄÊÇÌṩÆäËüÆøÌåµÄ¸ÉÈÅ»ò±ä¶¯Äܹ»ºöÂÔ²»¼ÆµÄ³ôÑõÆøÃôÔª¼þ¡¢¼ì²â×°ÖÃ(²âÁ¿×°ÖÃ)ºÍ¼ì²â·½·¨(²âÁ¿·½·¨)¡£
ΪÁË´ïµ½ÉÏÊöÄ¿µÄ£¬±¾·¢Ã÷µÄ³ôÑõÆøÌå²âÁ¿·½·¨°üÀ¨ÏÂÊö²½ÖèÖÆ±¸ÆøÃôÔª¼þ£¬ÔÚÆøÃôÔª¼þÖУ¬¿É¼ûÇøµÄ¹âÎüÊÕÐÔÄÜËæÆäÓë³ôÑõÆøÌåµÄ·´Ó¦¶ø±ä»¯µÄȾÁÏ(×ÅÉ«¼Á)³Á»ýÔÚ¶à¿×²ÄÁϵĿ×ÖУ»Ê¹ÆøÃôÔª¼þÔÚ¼ì²â»·¾³Öб©Â¶Ô¤¶¨Ê±¼ä£¬»ùÓÚÆøÃôÔª¼þÔÚ¼ì²â»·¾³Öб©Â¶Ç°ºÍ±©Â¶Ô¤¶¨Ê±¼äºó¹âÎüÊյı仯²âÁ¿Ä¿±êÆøÌåÖеijôÑõÆøÌåÁ¿¡£
±¾·¢Ã÷µÄ³ôÑõÆøÃôÔª¼þ°üÀ¨¶à¿×²ÄÁϺͳÁ»ýÔÚ¶à¿×²ÄÁϵĿ×ÖÐÇҿɼûÇøµÄ¹âÎüÊÕÐÔÄÜËæÆäÓë³ôÑõÆøÌåµÄ·´Ó¦¶ø±ä»¯µÄȾÁÏ(×ÅÉ«¼Á)¡£
±¾·¢Ã÷µÄ³ôÑõÆøÌå²âÁ¿×°ÖðüÀ¨·¢¹âµ¥Ôª¡¢¹â¼ì²âµ¥Ôª¡¢ÆøÃôÔª¼þºÍÐźŴ¦Àíµ¥Ôª£¬ÆäÖУ¬·¢¹âµ¥Ôª·¢ÉäÔ¤¶¨²¨³¤µÄ¹â£¬ÆøÃôÔª¼þ²åÈëÔÚ·¢¹âµ¥ÔªºÍ¹â¼ì²âµ¥ÔªÖ®¼ä£¬ÆøÃôÔª¼þ°üÀ¨¶à¿×²ÄÁϺͳÁ»ýÔÚ¶à¿×²ÄÁϵĿ×ÖÐÇҿɼûÇøµÄ¹âÎüÊÕÐÔÄÜËæÆäÓë³ôÑõÆøÌåµÄ·´Ó¦¶ø±ä»¯µÄȾÁÏ£¬¹â¼ì²âµ¥Ôª°üÀ¨²¼ÖÃÎªÃæ¶Ô·¢¹âµ¥ÔªµÄ¹â½ÓÊÕ±íÃæ£¬ÀûÓÃÆøÃôÔª¼þ½ÓÊÕ·¢¹âµ¥Ôª·¢ÉäµÄ¹â£¬²¢Êä³ö¶ÔÓ¦ÓÚ¹â½ÓÊÕ±íÃæ½ÓÊյĹâͨÁ¿µÄÐźţ¬ÐźŴ¦Àíµ¥Ôª»ùÓÚ¹â¼ì²âµ¥ÔªµÄÊä³öÐźźÍÊÂÏȵõ½µÄº¬ÓÐȾÁÏµÄÆøÃôÔª¼þÔÚȾÁÏÓë³ôÑõÆøÌ巴ӦǰµÄ¹âÎüÊÕÐÔÄܼÆËã³ôÑõÆøÌåÁ¿¡£
¸½Í¼¼òÊö
ͼ1A-1CÊÇ˵Ã÷Éú²ú±¾·¢Ã÷Ò»¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þµÄ·½·¨µÄÊÓͼ£»Í¼1D-1FÊÇ˵Ã÷±¾·¢Ã÷Ò»¸öʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â·½·¨µÄÊÓͼ£»Í¼2ÊÇʾ³ö±¾·¢Ã÷Ò»¸öʵʩ·½°¸µÄÁ½´ÎÎü¹âÂʲâÁ¿½á¹ûµÄ×ù±êͼ£»Í¼3ÊÇʾ³ö±¾·¢Ã÷Ò»¸öʵʩ·½°¸µÄÆøÃôÔª¼þÅäÖõÄʾÒâͼ£»Í¼4ÊÇʾ³ö³ôÑõŨ¶ÈºÍµÚÒ»¸öʵʩ·½°¸µÄÆøÃôÔª¼þÖеÄ͸ÉäÂʵĹØÏµµÄÏà¹ØÍ¼£»Í¼5ÊÇʾ³ö²£Á§¶à¿×²ÄÁϺÍ͸¹âÂʵĹØÏµµÄÏà¹ØÍ¼£»Í¼6ÊÇʾ³ö±¾·¢Ã÷µÚ¶þ¸öʵʩ·½°¸µÄÆøÃôÔª¼þµÄÌØÕ÷µÄ×ù±êͼ£»Í¼7ÊÇʾ³öÔÚ±¾·¢Ã÷µÚ¶þ¸öʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â·½·¨ÖÐÁ½´ÎÎü¹âÂʲâÁ¿½á¹ûµÄ×ù±êͼ£»Í¼8ÊÇʾ³öÔÚ±¾·¢Ã÷µÚÈý¸öʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â·½·¨ÖÐÁ½´ÎÎü¹âÂʲâÁ¿½á¹ûµÄ×ù±êͼ£»Í¼9ÊÇʾ³öÔÚ±¾·¢Ã÷µÚËĸöʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â·½·¨ÖÐÁ½´ÎÎü¹âÂʲâÁ¿½á¹ûµÄ×ù±êͼ£»Í¼10ÊÇʾ³öÔÚ±¾·¢Ã÷µÚËĸöʵʩ·½°¸µÄÁíÒ»ÖÖ³ôÑõÆøÌå¼ì²â·½·¨ÖÐÁ½´ÎÎü¹âÂʲâÁ¿½á¹ûµÄ×ù±êͼ£»Í¼11ÊÇʾ³öÔÚ±¾·¢Ã÷µÚÎå¸öʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â·½·¨ÖÐÁ½´ÎÎü¹âÂʲâÁ¿½á¹ûµÄ×ù±êͼ£»Í¼12ÊÇʾ³öÔÚ±¾·¢Ã÷µÚÁù¸öʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â·½·¨ÖÐÁ½´ÎÎü¹âÂʲâÁ¿½á¹ûµÄ×ù±êͼ£»Í¼13ÊÇʾ³öÔÚ±¾·¢Ã÷µÚÆß¸öʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â·½·¨ÖÐÁ½´ÎÎü¹âÂʲâÁ¿½á¹ûµÄ×ù±êͼ£»Í¼14ÊÇʾ³öÔÚ±¾·¢Ã÷µÚ°Ë¸öʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â·½·¨ÖÐÁ½´ÎÎü¹âÂʲâÁ¿½á¹ûµÄ×ù±êͼ£»Í¼15ÊÇʾÒâÐÔʾ³ö±¾·¢Ã÷Ò»¸öʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â×°ÖõÄÅäÖõķ½¿òͼ¡£
¾ßÌåʵʩÀý·½Ê½
ÏÂÃæ²Î¿¼¸½Í¼ÃèÊö±¾·¢Ã÷µÄÓÅѡʵʩ·½°¸¡£
µÚÒ»¸öʵʩ·½°¸ÏÂÃæËµÃ÷µÚÒ»¸öʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â·½·¨(²âÁ¿·½·¨)¡£
ÏÂÃæÃèÊöÆøÃôÔª¼þµÄÖÆ×÷·½·¨¡£
Èçͼ1AËùʾ£¬ÔÚÈÝÆ÷102ÖÐÖÆ±¸º¬Ò»ºÅ³ÈÒÒ´¼ÈÜÒººÍË®µÄ»ìºÏÈÜÒº101¡£Ò»ºÅ³ÈµÄŨ¶ÈÊÇ0.2£¥¡£
Èçͼ1BËùʾ£¬½«¶à¿×²ÄÁÏ103½þÅÝÔÚÈÜÒº101ÖС£¶à¿×²ÄÁÏ103µÄÒ»¸öÀý×ÓÊÇÆ½¾ù¿×¾¶Îª4nmµÄ¶à¿×²£Á§¡£µÚÒ»¸öʵʩ·½°¸Óùº×ÔCorningµÄVycor 7930×÷Ϊ¶à¿×²ÄÁÏ103¡£¶à¿×²ÄÁϵĴóСÊÇÆ¬³ß´çΪ8(mm)¡Á8(mm)£¬ºñ¶ÈΪ1(mm)¡£
¶à¿×²ÄÁÏ103ÔÚÈÜÒº101ÖнþÅÝ24Сʱ£¬ÓÃÈÜÒº½þ×Õ¶à¿×²ÄÁÏ103µÄ¿×¡£È»ºó½«¶à¿×²ÄÁÏ103¿ÕÆø¸ÉÔï¡£Èçͼ1CËùʾ£¬¶à¿×²ÄÁÏ103ÔÚµªÆøÆøÁ÷ÖиÉÔï24Сʱ»ò¸ü³¤Ê±¼ä£¬´Ó¶øÐÎ³ÉÆøÃôÔª¼þ103a¡£
ÏÂÃæÃèÊöʹÓÃÆøÃôÔª¼þ103aµÄ³ôÑõÆøÌå¼ì²â·½·¨(²âÁ¿·½·¨)¡£
Èçͼ1DËùʾ£¬²âÁ¿ÆøÃôÔª¼þ103aÔÚºñ¶È·½ÏòÉϵÄÎü¹âÂÊ¡£ÔÚͼ1DÖУ¬I0±íʾÈëÉä¹âµÄ¹âÇ¿¶È£¬¶øI±íʾ͸Éä¹âµÄ¹âÇ¿¶È¡£ÔÚÕâÖÖÇé¿öÏ£¬ÓÃlog10(I0/I)±íʾÎü¹âÂÊ¡£
Èçͼ1EËùʾ£¬ÆøÃôÔª¼þ103aÔÚ³ôÑõŨ¶ÈÀýÈçΪ100ppbµÄ²âÁ¿Ä¿±ê¿ÕÆø104Öб©Â¶Ô¤¶¨Ê±¼äÈç3Сʱ¡£È»ºó½«ÆøÃôÔª¼þ103a´Ó²âÁ¿Ä¿±ê¿ÕÆø104ÖÐÈ¡³ö¡£Èçͼ1FËùʾ£¬ÔٴβâÁ¿ÆøÃôÔª¼þ103aÔÚºñ¶È·½ÏòÉϵÄÎü¹âÂÊ¡£
ͼ2ʾ³öÁ½´ÎÎü¹âÂʵIJâÁ¿½á¹û(Îü¹âÂÊ·ÖÎöÖµ)¡£ÔÚ²âÁ¿ÖУ¬Í¸Éä¹â²âÁ¿²¨³¤Îª350nm»ò¸üСʱûÓвâÁ¿Îü¹âÂÊ£¬ÒòΪ¹âÏß±»¹¹³ÉÆøÃôÔª¼þµÄ¶à¿×²£Á§(Vycor 7930)ÎüÊÕ¡£
ÔÚͼ2ÖУ¬ÐéÏß±íʾ±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐ֮ǰµÄÎü¹âÂʲâÁ¿½á¹û£¬ÊµÏß±íʾ±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐÒÔºóµÄÎü¹âÂʲâÁ¿½á¹û¡£ÊµÏߺÍÐéÏß¶¼ÔÚ²¨³¤Ô¼Îª1350nmºÍ1900nm´¦ÓÐË®ÎüÊÕ·å¡£ÔÚ1350nmºÍ1900nm²¨³¤ÖÜΧÎüÊյı仯ȡ¾öÓÚ²âÁ¿Ä¿±ê¿ÕÆøµÄʪ¶ÈºÍÆøÃôÔª¼þµÄÍ£Áôʱ¼ä¡£Òò´Ë£¬Ê¹ÓÃÆøÃôÔª¼þ103aµÄ³ôÑõÆøÌå¼ì²â·½·¨(²âÁ¿·½·¨)µÄÓÐЧ²âÁ¿²¨³¤·¶Î§È·¶¨Îª350nm-1000nm¡£
²¨³¤·¶Î§Îª400nm-600nm£¬ÌرðÊÇ480nm¸½½ü·¢ÏÖʵÏߺÍÐéÏßÓкܴó²îÒì¡£ÆøÃôÔª¼þ103a±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐÒÔºóµÄÎü¹âÂʲâÁ¿ÖµÔÚ480nmµÄ²¨³¤´¦Îü¹âÂÊϽµ¡£ÕâÒâζ×ŵ±ÆøÃôÔª¼þ103a±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐʱ£¬ÆøÃôÔª¼þÖеÄȾÁÏ(×ÅÉ«¼Á)·Ö½â£¬Éú³Éеķֽâ²úÆ·¡£ÕâÖÖ²úÆ·¿ÉÒÔÈÏΪÊÇÒ»ºÅ³ÈµÄ·Ö×ӹǼÜÖк¬ÓеÄÖØµª»ù·Ö½âËù²úÉúµÄ¡£
ÔÚµÚÒ»¸öʵʩ·½°¸ÖУ¬Í¨¹ý²âÁ¿È¾ÁÏ(×ÅÉ«¼Á)Óë³ôÑõ·´Ó¦Ç°ºóµÄÑÕÉ«±ä»¯¼ì²â³ôÑõÆøÌå¡£
ÏÂÃæËµÃ÷µÚÒ»¸öʵʩ·½°¸µÄÆøÃôÔª¼þ¡£
Èçͼ3Ëùʾ£¬ÓÃÉÏÊöÉú²ú·½·¨ÖÆ×÷µÄÆøÃôÔª¼þ302¾ßÓÐ͸Ã÷µÄ»ùÌåÐÎ×´£¬ÆäÖÐÓÐÐí¶àƽ¾ù¿×¾¶ÀýÈçΪ20nm»ò¸üСµÄ¿×301¡£ÆøÃôÔª¼þ302×÷ΪÎü¸½¼Á¡£¶à¿×²ÄÁÏ305ÖеÄÖÁÉÙһЩ¿×301Óë¶à¿×²ÄÁϱíÃæÉϵĿ׿ÁªÔÚÒ»Æð¡£
ȾÁÏ(×ÅÉ«¼Á)³Á»ýÔÚÆøÃôÔª¼þ302µÄ¿×301ÖС£¶à¿×²ÄÁϱ©Â¶ÔÚ¿ÕÆøÖУ¬È»ºó¿ÕÆøÖеÄË®·ÖÎü¸½ÔÚ¿×ÖУ¬Ðγɺܱ¡µÄˮĤ¡£½á¹û¿ÉÒÔÈÏΪÆäÖÐÈܽâÓÐȾÁÏ(×ÅÉ«¼Á)µÄË®ÈÜÒº(²¶¼¯ºÍ¼ì²âÈÜÒº)±¡Ä¤303ÐγÉÔÚÆøÃôÔª¼þ302µÄ¿×301µÄÄÚ±ÚÉÏ¡£ÒòΪÖÁÉÙһЩ¿×301Óë¶à¿×²ÄÁϱíÃæÉϵĿ׿ÁªÔÚÒ»Æð£¬ËùÒÔ¿ÉÒÔÈÏΪÖÁÉÙһЩ¿×ÖгÁ»ýÓÐȾÁÏ¡£
½øÈëÆøÃôÔª¼þ302µÄ¿×301ÖеijôÑõ·Ö×Ó304ÓëȾÁÏ·´Ó¦£¬·Ö½âÖØµª»ù¡£¼´£¬ÔÚ·Ö×ÓÉÏÉìÕ¹µÄ¦Ðµç×Óϵͳһ·ÖΪ¶þ¡£·ÖÁѵķÖ×ÓÔÚ480nm¸½½ü²»ÎüÊÕÈκιâÏߣ¬Òò´ËÆøÃôÔª¼þ302µÄÑÕÉ«¼õÈõ¡£¼´£¬È¾ÁϺͳôÑõ·¢ÉúÍÊÉ«·´Ó¦¡£ÒòΪÖÁÉÙһЩ¿×301Óë¶à¿×²ÄÁϱíÃæÉϵĿ׿ÁªÔÚÒ»Æð£¬ËùÒÔ¿ÉÒÔÈÏΪ³ôÑõÆøÌåÓëÖÁÉÙһЩ¿×ÖгÁ»ýµÄȾÁÏ·¢Éú·´Ó¦¡£
Òò´Ë£¬ÀýÈçͨ¹ýÓ÷ֹâ¹â¶È¼Æ(ÎüÊÕ¼Æ)²âÁ¿ÆøÃôÔª¼þµÄÎüÊÕ¹âÆ×¿ÉÒÔ¶¨Á¿¼ì²â·Ö½âµÄ·Ö×Ó¡£Í¨¹ý¶¨Á¿¼ì²â¿ÉÒÔ¼ä½Ó²âÁ¿³ôÑõÆøÌå¡£
ÀýÈ磬¶à¿×²ÄÁÏÊÇÓÃÄܹ»´«ÊäȾÁϹâÎüÊÕ²¨³¤·¶Î§ÄڵĹâÏߵIJÄÁÏÖÆ³ÉµÄ¡£²âÁ¿Îü¸½³ôÑõÆøÌåµÄÆøÃôÔª¼þµÄ¹âÎüÊÕÐÔÄÜ¡£Í¨¹ý²âÁ¿¹âÎüÊÕÐÔÄÜ¿ÉÒÔ¼ì²âÎü¸½µÄ³ôÑõÆøÌå¡£
ÈçÉÏËùÊö£¬µ±ÆøÃôÔª¼þÔÚ³ôÑõŨ¶ÈΪ100ppbµÄ²âÁ¿Ä¿±ê¿ÕÆøÖб©Â¶3Сʱʱ²âÁ¿µÚÒ»¸öʵʩ·½°¸¡£×÷ΪÎü¹âÂʵIJâÁ¿½á¹û£¬Èçͼ2Ëùʾ£¬480nm²¨³¤´¦µÄÎü¹âÂʱ仯ֵԼΪ0.17£¬ËùÒÔ¿ÉÒÔ¸ßÁéÃô¶ÈµØ¼ì²â100ppb¼¶±ðµÄ³ôÑõÆøÌå¡£
²âÁ¿Îü¹âÂÊʱ½«ÆøÃôÔª¼þ103a¹Ì¶¨ÔÚÎüÊռƵı¡Ä¤²âÁ¿Ö§¼ÜÉÏ¡£µÃµ½²âÁ¿Îü¹âÂÊʱµÄÎü¹âÂʲîÖµºÍŨ¶ÈµÄ¹ØÏµ¾Í¿ÉÒÔ¶¨Á¿¼ì²âppb¼¶µÄ³ôÑõŨ¶È¡£
½«µÃµ½µÄÿµ¥Î»±©Â¶Á¿(Ũ¶È(ppb)¡Á±©Â¶Ê±¼ä(h))×î´óÎüÊÕ²¨³¤´¦Îü¹âÂʵı仯ֵ×÷ΪÁéÃô¶ÈÖ¸Êý¡£ÔÚµÚÒ»¸öʵʩ·½°¸ÖУ¬Èçͼ2Ëùʾ£¬ÔÚ100ppbµÄ³ôÑõÆøÌåÖб©Â¶3СʱºóµÄÎü¹âÂʱ仯ֵÊÇ0.17¡£ÁéÃô¶ÈÖ¸ÊýÊÇ5.7¡Á10-4ppb-1.hr-1¡£´Ó¶ø¿ÉÒÔ´ïµ½·Ç³£¸ßµÄÁéÃô¶È¡£
ÈçÉÏËùÊö£¬ÔÚµÚÒ»¸öʵʩ·½°¸ÖƱ¸µÄÆøÃôÔª¼þÖУ¬ºÍ³ôÑõÆøÌ巴Ӧʱ¶Ô¿É¼û¹âµÄÎüÊÕ²»ÄÜ¿ÉÄæ±ä»¯µÄȾÁϳÁ»ýÔÚ͸Ã÷¶à¿×²ÄÁϵĿ×ÖС£¿ÉÒÔÈÏΪµ±ÆøÃôÔª¼þ±©Â¶ÔÚº¬³ôÑõÆøÌåµÄ´óÆøÖÐʱ£¬Îü¸½ÔÚÆøÃôÔª¼þ¿×ÖеijôÑõÆøÌåʹȾÁÏÖеÄË«¼üÈçÖØµª»ù¶Ï¿ª£¬È¾ÁÏ·Ö×ӵĵç×Ó״̬·¢Éú±ä»¯£¬´Ó¶ø¸Ä±ä¿É¼ûÇøµÄÎüÊÕ¹âÆ×¡£Òò´Ë£¬µ±ÆøÃôÔª¼þµÄÑÕÉ«·¢Éú±ä»¯ÇÒµÚÒ»ºÍµÚ¶þ͸ÉäÂʲ»Í¬Ê±¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£
µÚÒ»¸öʵʩ·½°¸ÓÃÒ»ºÅ³È×÷ΪȾÁϵÄÀý×Ó¡£ÖصªÈ¾ÁϵÄÀý×ÓÓжþºÅ³È¡¢³ÈG¡¢¼×»ù³È¡¢ÙÂ˹Âóר¡¢¼×»ù»Æ¡¢ËáÐÔ¸õ×ÏK¡¢²Ø»¨³ÈG¡¢¸õ±äËØFB¡¢ÐÂëÙÖ¬¡¢½á¾§Ðɺ졢ÜçËØÀ¶ºÚR¡¢Plasmocorinth B¡¢ËÕµ¤II¡¢ËÕµ¤III¡¢ËÕµ¤IV¡¢ËÕµ¤ºìB¡¢ËÕµ¤ºì7B¡¢Ííϼ»ÆFCF¡¢¼×±½°·ºì¡¢½ðÁ«³ÈO¡¢¶þ¼×´ú±½°·Àö´ººì2R¡¢Ð¿Ò»ÄÆÑΡ¢±½²¢ºì×Ï4B¡¢Biebrich Scarlet Red¡¢ÔæºìR¡¢ÁÁ²Ø»¨¾«MOO¡¢2-(5-äå-2-ßÁऻùżµª)-5-(¶þÒÒ»ù°±»ù)±½·Ó¡¢6¡¯-¶¡Ñõ»ù-2£¬6-¶þ°±»ù-3£¬3¡¯-żµª¶þßÁड¢ËáÐÔºÚ24¡¢ËáÐÔÀ¶29¡¢ËáÐÔÀ¶92¡¢ËáÐÔÀ¶113¡¢ËáÐÔÀ¶120¡¢ËáÐÔ³È8¡¢ËáÐÔ³È51¡¢ËáÐÔ³È63¡¢ËáÐÔ³È74¡¢ËáÐÔºì1¡¢ËáÐÔºì4¡¢ËáÐÔºì8¡¢ËáÐÔºì37¡¢ËáÐÔºì97¡¢ËáÐÔºì114¡¢ËáÐÔºì151¡¢ËáÐÔºì183¡¢ËáÐÔ×Ï7¡¢ËáÐÔ»Æ17¡¢ËáÐÔ»Æ25¡¢ËáÐÔ»Æ29¡¢ËáÐÔ»Æ34¡¢ËáÐÔ»Æ42¡¢ËáÐÔ»Æ76¡¢ËáÐÔ»Æ99¡¢ÜçËØ»ÆGG¡¢Allura Red AC¡¢ÜȲ˺졢Calcion¡¢Ö¥¼Ó¸çÌìÀ¶6B¡¢¸õ±äËØ2B¡¢¸õ±äËØ2R¡¢¼îÐԾճȡ¢¸Õ¹ûºì¡¢Ö±½ÓÀ¶71¡¢Ö±½Óºì23¡¢Ö±½Óºì75¡¢Ö±½Óºì80¡¢Ö±½Óºì81¡¢Ö±½Ó×Ï51¡¢Ö±½Ó»Æ50¡¢Ö±½Ó»Æ62¡¢·ÖÉ¢ºì1¡¢·ÖÉ¢ºì19¡¢·ÖÉ¢»Æ3¡¢Ñòë¸õÀ¶ºÚB¡¢Ñòë¸õºÚT¡¢°£ÎÄ˹À¶¡¢Ö¬ÈÜÐÔרRR¡¢¼ä°·»Æ¡¢ÝÁ·ÓÀ¶ºÚ¡¢Ïõົơ¢µªºì¡¢Ïõ»ùí¿Å¼µªIII¡¢ÈܼÁºì26ºÍÓͺìO¡£È¾ÁϵÄÒ»¸öÀý×ÓÊÇÈý±½»ù¼×Íé×ÅÉ«¼Á(Èç¿×ȸÂÌ¡¢½á¾§×Ï»òÆ·ºì)¡£È¾ÁϵÄÒ»¸öÀý×ÓÊǺ¬µåÀ¶µÄµåÇàÀà(ÈçµåÀ¶»òµåÀ¶ëÙÖ¬ºì)¡£
ȾÁϵÄÒ»¸öÀý×ÓÊǼÈÊÇ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐÖØµª»ùµÄȾÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£
ȾÁϵÄÒ»¸öÀý×ÓÊǼÈÊÇ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐôÇ»ù¡¢ÑÇÁòËá»ù»ò²®ÖÁÊå°±»ùµÄÖØµªÈ¾ÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£»¹Äܹ»Ê¹È¾ÁϾßÓÐÎȶ¨ÐÔ£¬ÒÔ¸üÎȶ¨µØ¼ì²â³ôÑõ¡£
×÷Ϊ½«È¾Áϵ¼Èë¶à¿×²ÄÁϵĿ×ÖеÄÒ»ÖÖ·½·¨£¬ÓÃÈÜÒº½«È¾ÁϽþ×Õµ½¶à¿×²ÄÁÏÖУ¬È¾Áϵ¼Èë¿×Öкó¸ÉÔï¡£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏ¿ÉÒÔͨ¹ýÆøÏà³Á»ýµ¼Èë¿×ÖС£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏºÍÆäËü»¯ºÏÎï»ìºÏ£¬È»ºóÔÚÓÃÈܽºÄý½º·¨ÖÆ×÷¶à¿×²ÄÁÏʱ½«Æäµ¼Èë¿×ÖС£
¸ù¾ÝµÚÒ»¸öʵʩ·½°¸£¬ÓÃÔÚ¶à¿×²ÄÁϵĿ×Öк¬ÓÐȾÁÏµÄÆøÃôÔª¼þ103a¿ÉÒÔÔö¼Ó´ý¼ì²âµÄ³ôÑõÆøÌåµÄÎü¸½Ãæ»ý¡£Ó봫ͳ·½·¨Ïà±È£¬ÆäÁéÃô¶ÈºÍÀÛ¼ÆÄÜÁ¦¾ùÓÐÌá¸ß£¬´Ó¶ø¿ÉÒÔʵÏÖÀÛ¼ÆÓ¦Óá£
¸ù¾ÝµÚÒ»¸öʵʩ·½°¸£¬¹¹³ÉÆøÃôÔª¼þ103aµÄ¶à¿×²ÄÁÏÔÚÔ¼350nm-1000nmµÄ²¨³¤·¶Î§ÄÚÓкܸߵÄ͸ÉäÂÊ¡£Í¨¹ý²âÁ¿ÆøÃôÔª¼þµÄ͸ÉäÂÊ¿ÉÒÔ²âÁ¿ÔÚÆøÃôÔª¼þÖÐÎü¸½ÓгôÑõʱ½«·Ö½âµÄÆøÃôÔª¼þµÄÎü¹âÂʵı仯ֵ¡£¼´£¬²âÁ¿ºÍ¶Ô±ÈÆøÃôÔª¼þ103aÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖб©Â¶Ç°ºóµÄÆøÃôÔª¼þµÄÎü¹âÂÊ¡£½á¹û£¬¿ÉÒÔ¼ì²âÎü¸½ÔÚÆøÃôÔª¼þ103aÖеijôÑõÆøÌ壬´Ó¶øÒ×ÓÚ¼ì²â³ôÑõÆøÌå¡£ÔÚÎü¹âÂʲâÁ¿ÖУ¬Ö»ÓÐÒ»¸ö×ãÒÔ¼ì²âµÄµ¥·åÔڱ仯£¬Òò´ËÕâÖÖ²âÁ¿Ò×ÓÚ½øÐС£
ÔÚµÚÒ»¸öʵʩ·½°¸µÄÆøÃôÔª¼þÖУ¬ÆøÃôÔª¼þÔÚÔ¤¶¨²¨³¤´¦µÄ͸ÉäÂÊËæ¼ì²âÄ¿±êÆøÌåÖгôÑõÆøÌåŨ¶ÈµÄÔö¼Ó¶øÔö´ó¡£ÔÚµÚÒ»¸öʵʩ·½°¸µÄÇé¿öÏÂÔ¤¶¨²¨³¤Ô¼Îª480nm¡£
µÚÒ»¸öʵʩ·½°¸Í¨¹ýʹÓÃСÐÍÆøÃôÔª¼þ103a¿ÉÒÔÓùâѧ±ä»¯¼ì²â³ôÑõÆøÌ壬¿ÉÒԷdz£ÈÝÒ׵ظ߾«¶È¼ì²â³ôÑõÆøÌå¡£
ÖÁÓÚ¹¹³ÉÆøÃôÔª¼þµÄ¶à¿×²ÄÁÏÓëÆä͸¹âÂʵĹØÏµ£¬Èçͼ5Ëùʾ£¬µ±ÆøÃôÔª¼þÊÇÓöà¿×²£Á§(Åð¹è²£Á§)ÖÆ³ÉµÄʱ£¬½«Æ½¾ù¿×¾¶ÉèÖÃΪ20nm»ò¸üС£¬ÔÚUV¿É¼û¹â²¨³¤Çø(²¨³¤200nm-2000nm)²âÁ¿Í¸Éä¹âÆ×ʱ¹âÏß¿ÉÒÔÔڿɼû¹âÇø(350nm-800nm)ÄÚ´«Êä¡£¶ÔÓڽϴóµÄƽ¾ù¿×¾¶À´Ëµ£¬Äܹ»¹Û²ìµ½¿É¼ûÇøµÄ͸ÉäÂÊͻȻϽµ¡£
ÔÚͼ5ÖУ¬µãÏß±íʾʯӢ²£Á§µÄ͸ÉäÂÊ£»µã»®Ïß±íʾ¿×¾¶Îª2.5nmµÄÅð¹è²£Á§¶à¿×²ÄÁϵÄ͸ÉäÂÊ£»ÊµÏß±íʾµÚÒ»¸öʵʩ·½°¸ÖвÉÓõÄVycor7930µÄ͸ÉäÂÊ£»ÐéÏß±íʾ¿×¾¶Îª20nmµÄÅð¹è²£Á§¶à¿×²ÄÁϵÄ͸ÉäÂÊ¡£
µã»®ÏߺÍÐéÏß±íʾµÄÑùÆ·¹º×ÔGeltec¡£ÔÚ͸ÉäÂʲâÁ¿·½·¨ÖÐʹÓõÄËùÓÐÑùÆ·µÄºñ¶È¶¼ÊÇ1mm¡£
´Óͼ5µÄ½á¹û¿´£¬¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶ÓÅÑ¡ÊÇ20nm»ò¸üС¡£¿ÉÒÔÈÏΪ³ß´çΪ0.3nm-5nmµÄȾÁÏÄܹ»³Á»ýÔÚ¶à¿×²ÄÁϵĿ×ÖС£Í¸Ã÷¶à¿×²ÄÁÏÓÅÑ¡ÓÃÔÚ350nm-800nmµÄ¿É¼ûÇø¡£ÔÚµÚÒ»¸öʵʩ·½°¸ÖУ¬¶à¿×²ÄÁϵıȱíÃæ»ýÊÇ100m2/g»ò¸ü´ó¡£
µÚ¶þ¸öʵʩ·½°¸ÏÂÃæËµÃ÷±¾·¢Ã÷µÚ¶þ¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þ¡£
ÏÂÃæÃèÊöµÚ¶þ¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þµÄÖÆ×÷·½·¨¡£
Èçͼ1AËùʾ£¬½«Ì¼ËáÄÆÈܽâÔÚË®ÖУ¬µÃµ½µÄÈÜÒº×÷Ϊ¼îÐÔÈÜÒº¡£Ì¼ËáÄÆµÄŨ¶ÈÊÇ5£¥¡£
Èçͼ1BËùʾ£¬Ê¹Æ½¾ù¿×¾¶Îª4nmµÄ¶à¿×²ÄÁÏÔÚ¼îÐÔÈÜÒºÖнþÅÝÔ¤¶¨Ê±¼äÈç2Сʱ£¬È»ºóÓô¿¾»Ë®Ï´¾»¡£
ÕâÖÖ¶à¿×²ÄÁÏÓëµÚÒ»¸öʵʩ·½°¸ÖÐËùÊöµÄÏàͬ£¬ÊÇÓùº×ÔCorningµÄVycor 7930ÖÆ³ÉµÄ¡£¶à¿×²ÄÁÏµÄÆ¬³ß´çΪ8(mm)¡Á8(mm)£¬ºñ¶ÈΪ1(mm)¡£
½«Æ·ºìÈܽâÔÚÒÒ´¼ÖÐÖÆ±¸ÈÜÒº¡£Æ·ºìŨ¶ÈÊÇ0.002£¥¡£ÒѾÔÚ¼îÐÔÈÜÒºÖнþÅݹýÇÒÒѾÓô¿¾»Ë®Ï´¾»µÄ¶à¿×²ÄÁÏÔÚÆ·ºìÒÒ´¼ÈÜÒºÖнþÅÝ2Сʱ£¬Ê¹ÈÜÒº½þÈë¶à¿×²ÄÁϵĿ×ÖС£È»ºó½«¶à¿×²ÄÁÏ¿ÕÆø¸ÉÔï¡£¶à¿×²ÄÁÏÔÚµªÆøÆøÁ÷ÖиÉÔï°ëÌì»ò¸ü³¤Ê±¼ä£¬´Ó¶øÐγɵڶþ¸öʵʩ·½°¸µÄÆøÃôÔª¼þ¡£
ÔÚÉÏÊöÖÆ×÷·½·¨ÖУ¬½«¶à¿×²ÄÁϽþÅÝÔÚ´¿¾»Ë®ÖУ¬¶ø²»ÊǽþÅÝÔÚ¼îÐÔÈÜÒºÖУ¬È»ºóÔÙ½þÅÝÔÚÆ·ºìÈÜÒºÖУ¬´Ó¶øÖÆ³É¶Ô±ÈÆøÃôÔª¼þ¡£²âÁ¿ÓÃÉÏÊö·½·¨ÖÆ×÷µÄµÚ¶þ¸öʵʩ·½°¸µÄÆøÃôÔª¼þºÍ¶Ô±ÈÆøÃôÔª¼þµÄÎü¹âÂÊ¡£
ÏÂÃæ²Î¿¼Í¼6˵Ã÷µ±µÚ¶þ¸öʵʩ·½°¸µÄÆøÃôÔª¼þºÍ¶Ô±ÈÆøÃôÔª¼þ¾²ÖÃÔÚµªÆøÖÐʱÔÚ545nm´¦µÄÎü¹âÂʱ仯ֵ¡£
ûÓнøÐмÀíµÄ¶Ô±ÈÆøÃôÔª¼þ¼´Ê¹ÔÚµªÆøÖÐÆäÎü¹âÂÊÒ²·¢Éú±ä»¯¡£Ïà·´£¬½øÐÐÁ˼ÀíµÄµÚ¶þ¸öʵʩ·½°¸µÄÆøÃôÔª¼þµÄÎü¹âÂÊÊÇÎȶ¨µÄ£¬Ã»ÓÐÈκα仯¡£
ÏÂÃæ²Î¿¼Í¼7˵Ã÷½øÐÐÁ˼ÀíµÄµÚ¶þ¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖб©Â¶Ç°ºóµÄÆøÃôÔª¼þµÄÎüÊÕ¹âÆ×±ä»¯¡£ÔÚͼ7ÖУ¬ÐéÏß±íʾµÚ¶þ¸öʵʩ·½°¸µÄÆøÃôÔª¼þ±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐ֮ǰµÄÎüÊÕ¹âÆ×£¬ÊµÏß±íʾµÚ¶þ¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ³ôÑõŨ¶ÈΪ100ppbµÄ¿ÕÆøÖб©Â¶24СʱºóµÄÎüÊÕ¹âÆ×¡£
ÔÚͼ7ÖУ¬ÊµÏß±íʾµÄµÚ¶þ¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ545nm²¨³¤´¦µÄÎü¹âÂʽµµÍ¡£¿ÉÒÔÈÏΪ³öÏÖÕâÖÖÇé¿öµÄÔÒòÊdzôÑõʹƷºì·Ö×ÓÖÐµÄÆ·ºìͪÑǰ·(Fuchsonimine)·Ö½â£¬¼´£¬¦Ðµç×Óϵͳ·ÖÁÑ¡£
Îü¹âÂʵı仯ºÜ´ó£¬Ô¼Îª0.1¡£¼´Ê¹Óõڶþ¸öʵʩ·½°¸µÄÆøÃôÔª¼þ¼ì²â³ôÑõÆøÌ壬ҲÄܸßÁéÃô¶ÈµØ¼ì²âppb¼¶µÄ³ôÑõÆøÌå¡£
²Î¿¼Í¼7£¬µÃµ½µÄÁéÃô¶ÈÖ¸ÊýÊÇ4.2¡Á10-5ppb-1.hr-1¡£´Ó¶ø¿ÉÒÔ´ïµ½·Ç³£¸ßµÄÁéÃô¶È¡£
ÈçÉÏËùÊö£¬ÔÚµÚ¶þ¸öʵʩ·½°¸ÖƱ¸µÄÆøÃôÔª¼þÖУ¬¼îÓëºÍ³ôÑõÆøÌ巴Ӧʱ¶Ô¿É¼ûÇøµÄÎü¹âÂÊ·¢Éú±ä»¯µÄȾÁÏ(×ÅÉ«¼Á)³Á»ýÔÚ͸Ã÷¶à¿×²ÄÁϵĿ×ÖС£¿ÉÒÔÈÏΪµ±ÆøÃôÔª¼þ±©Â¶ÔÚº¬³ôÑõÆøÌåµÄ´óÆøÖÐʱ£¬Îü¸½ÔÚÆøÃôÔª¼þ¿×ÖеijôÑõÆøÌåʹȾÁÏÖеÄË«¼üÈçC£½C¶Ï¿ª£¬È¾ÁÏ·Ö×ӵĵç×Ó״̬·¢Éú±ä»¯£¬´Ó¶ø¸Ä±ä¿É¼ûÇøµÄÎüÊÕ¹âÆ×¡£Òò´Ë£¬µ±ÆøÃôÔª¼þµÄÑÕÉ«·¢Éú±ä»¯ÇÒµÚÒ»ºÍµÚ¶þ͸ÉäÂʲ»Í¬Ê±¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£
µÚ¶þ¸öʵʩ·½°¸ÓÃÆ·ºì×÷ΪȾÁϵÄÀý×Ó¡£È¾ÁϵÄÒ»¸öÀý×ÓÊÇÈý±½»ù¼×Íé×ÅÉ«¼Á(Èç¿×ȸÂÌ»ò½á¾§×Ï)¡£
×÷Ϊ½«È¾Áϵ¼Èë¶à¿×²ÄÁϵĿ×ÖеÄÒ»ÖÖ·½·¨£¬Óò¶¼¯ºÍ¼ì²âÈÜÒº½«È¾ÁϽþ×Õµ½¶à¿×²ÄÁÏÖУ¬È¾Áϵ¼Èë¿×Öкó¸ÉÔï¡£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏ¿ÉÒÔͨ¹ýÆøÏà³Á»ýµ¼Èë¿×ÖС£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏºÍÆäËü»¯ºÏÎï»ìºÏ£¬È»ºóÔÚÓÃÈܽºÄý½º·¨ÖÆ×÷¶à¿×²ÄÁÏʱ½«Æäµ¼Èë¿×ÖС£
¸ù¾ÝµÚ¶þ¸öʵʩ·½°¸£¬ÓÃÔÚ¶à¿×²ÄÁϵĿ×Öк¬ÓÐȾÁÏµÄÆøÃôÔª¼þ103a¿ÉÒÔÔö¼Ó´ý¼ì²âµÄ³ôÑõÆøÌåµÄÎü¸½Ãæ»ý¡£Ó봫ͳ·½·¨Ïà±È£¬ÆäÁéÃô¶ÈºÍÀÛ¼ÆÄÜÁ¦¾ùÓÐÌá¸ß£¬´Ó¶ø¿ÉÒÔʵÏÖÀÛ¼ÆÓ¦Óá£
µÚ¶þ¸öʵʩ·½°¸Óý«Ì¼ËáÄÆÈܽâÔÚË®ÖÐÖÆ±¸µÄË®ÈÜÒº×÷Ϊ¼îÐÔÈÜÒºµÄÒ»¸öÀý×Ó¡£¼îµÄÀý×ÓÓмÉíºÍ¼îÑΡ£¼îÑεĿÉÓÃÀý×ÓÊÇÈõËáºÍÇ¿¼îÑΡ£
ÔÚµÚ¶þ¸öʵʩ·½°¸ÖУ¬¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶Ò²ÓÅÑ¡ÊÇ20nm»ò¸üС¡£
µÚÈý¸öʵʩ·½°¸ÏÂÃæËµÃ÷±¾·¢Ã÷µÚÈý¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þ¡£
ÏÂÃæÃèÊöµÚÈý¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þµÄÖÆ×÷·½·¨¡£
Èçͼ1AËùʾ£¬½«×÷ΪȾÁÏ(×ÅÉ«¼Á)µÄ¼×»ù³ÈºÍ×÷ΪËáÐÔÆøÌåÎü¸½¼ÁµÄÈýÒÒ´¼°·ÈܽâÔÚË®ÖУ¬ÖƱ¸ÈÜÒº¡£¼×»ù³ÈµÄŨ¶ÈÊÇ0.35£¥£¬ÈýÒÒ´¼°·µÄŨ¶ÈÊÇ1.0£¥¡£
Èçͼ1BËùʾ£¬Ê¹Æ½¾ù¿×¾¶Îª4nmµÄ¶à¿×²ÄÁϽþÅÝÔÚÈÜÒºÖС£¶à¿×²ÄÁÏÓëµÚÒ»¸öʵʩ·½°¸ÖÐËùÊöµÄÏàͬ£¬ÊÇÓùº×ÔCorningµÄVycor 7930ÖÆ³ÉµÄ¡£¶à¿×²ÄÁÏµÄÆ¬³ß´çΪ8(mm)¡Á8(mm)£¬ºñ¶ÈΪ1(mm)¡£
¶à¿×²ÄÁÏÔÚÈÜÒºÖнþÅÝ2Сʱ£¬Ê¹ÈÜÒº½þÈë¶à¿×²ÄÁϵĿ×ÖС£È»ºó½«¶à¿×²ÄÁÏ¿ÕÆø¸ÉÔï¡£¶à¿×²ÄÁÏÔÚµªÆøÆøÁ÷ÖиÉÔï°ëÌ죬´Ó¶øÐγɵÚÈý¸öʵʩ·½°¸µÄÆøÃôÔª¼þ¡£
ÏÂÃæ²Î¿¼Í¼8˵Ã÷µÚÈý¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖб©Â¶Ç°ºóµÄÆøÃôÔª¼þµÄÎüÊÕ¹âÆ×¡£ÔÚͼ8ÖУ¬ÐéÏß±íʾ±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐ֮ǰµÄÎüÊÕ¹âÆ×£¬ÊµÏß±íʾµÚÈý¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ³ôÑõŨ¶ÈΪ100ppbµÄ¿ÕÆøÖб©Â¶24СʱºóµÄÎüÊÕ¹âÆ×¡£
Èçͼ8Ëùʾ£¬µÚÈý¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ510nm²¨³¤´¦µÄÎü¹âÂʽµµÍ¡£½µµÍֵԼΪ0.3£¬´Ó¶ø¿ÉÒÔ¸ßÁéÃô¶ÈµØ¼ì²âppb¼¶µÄ³ôÑõÆøÌå¡£
²Î¿¼Í¼8£¬µÃµ½µÄÁéÃô¶ÈÖ¸ÊýÊÇ1.3¡Á10-4ppb-1.hr-1¡£
ÔÚÉÏÊöÖÆ×÷·½·¨ÖУ¬ÖÆ×÷¶Ô±ÈÆøÃôÔª¼þ£¬Ö»ÊÇûÓÐʹÓÃÈýÒÒ´¼°·¡£ÓÃ¶Ô±ÈÆøÃôÔª¼þÑо¿×÷ΪËáÐÔÆøÌåµÄNO2µÄ¸ÉÈÅËù²úÉúµÄÓ°Ïì¡£½á¹û¹Û²ìµ½NO2¶Ô¶Ô±ÈÆøÃôÔª¼þÓиÉÈÅ£¬¶øÔÚµÚÈý¸öʵʩ·½°¸µÄÆøÃôÔª¼þÖй۲첻µ½NO2ÓÐÈκθÉÈÅ¡£
ÈçÉÏËùÊö£¬ÔÚµÚÈý¸öʵʩ·½°¸ÖƱ¸µÄÆøÃôÔª¼þÖУ¬ËáÐÔÆøÌåÎü¸½¼ÁÓëºÍ³ôÑõÆøÌ巴Ӧʱ¶Ô¿É¼ûÇøµÄÎü¹âÂÊ·¢Éú±ä»¯µÄȾÁÏ(×ÅÉ«¼Á)³Á»ýÔÚ͸Ã÷¶à¿×²ÄÁϵĿ×ÖС£¿ÉÒÔÈÏΪµ±ÆøÃôÔª¼þ±©Â¶ÔÚº¬³ôÑõÆøÌåºÍÐí¶à·Ç³ôÑõÆøÌåµÄËáÐÔÆøÌåµÄ´óÆøÖÐʱ£¬Îü¸½ÔÚÆøÃôÔª¼þ¿×ÖеijôÑõÆøÌåʹȾÁÏÖеÄË«¼üÈçN£½N¶Ï¿ª£¬ÆøÃôÔª¼þ²»ÊÜËáÐÔÆøÌåµÄ¸ÉÈÅ£¬È¾ÁÏ·Ö×ӵĵç×Ó״̬·¢Éú±ä»¯£¬´Ó¶ø¸Ä±ä¿É¼ûÇøµÄÎüÊÕ¹âÆ×¡£Òò´Ë£¬µ±ÆøÃôÔª¼þµÄÑÕÉ«·¢Éú±ä»¯ÇÒµÚÒ»ºÍµÚ¶þ͸ÉäÂʲ»Í¬Ê±¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£
µÚÈý¸öʵʩ·½°¸Óü׻ù³È×÷ΪȾÁϵÄÀý×Ó¡£È¾ÁϵÄÀý×ÓÓÐÒ»ºÅ³È¡¢¶þºÅ³È¡¢³ÈG¡¢ÙÂ˹Âóר¡¢¼×»ù»Æ¡¢ËáÐÔ¸õ×ÏK¡¢²Ø»¨³ÈG¡¢¸õ±äËØFB¡¢ÐÂëÙÖ¬¡¢½á¾§Ðɺ졢ÜçËØÀ¶ºÚR¡¢Plasmocorinth B¡¢ËÕµ¤II¡¢ËÕµ¤III¡¢ËÕµ¤IV¡¢ËÕµ¤ºìB¡¢ËÕµ¤ºì7B¡¢Ííϼ»ÆFCF¡¢¼×±½°·ºì¡¢½ðÁ«³ÈO¡¢¶þ¼×´ú±½°·Àö´ººì2R¡¢Ð¿Ò»ÄÆÑΡ¢±½²¢ºì×Ï4B¡¢Biebrich Scarlet Red¡¢ÔæºìR¡¢ÁÁ²Ø»¨¾«MOO¡¢2-(5-äå-2-ßÁऻùżµª)-5-(¶þÒÒ»ù°±»ù)±½·Ó¡¢6¡¯-¶¡Ñõ»ù-2£¬6-¶þ°±»ù-3£¬3¡¯-żµª¶þßÁड¢ËáÐÔºÚ24¡¢ËáÐÔÀ¶29¡¢ËáÐÔÀ¶92¡¢ËáÐÔÀ¶113¡¢ËáÐÔÀ¶120¡¢ËáÐÔ³È8¡¢ËáÐÔ³È51¡¢ËáÐÔ³È63¡¢ËáÐÔ³È74¡¢ËáÐÔºì1¡¢ËáÐÔºì4¡¢ËáÐÔºì8¡¢ËáÐÔºì37¡¢ËáÐÔºì97¡¢ËáÐÔºì114¡¢ËáÐÔºì151¡¢ËáÐÔºì183¡¢ËáÐÔ×Ï7¡¢ËáÐÔ»Æ17¡¢ËáÐÔ»Æ25¡¢ËáÐÔ»Æ29¡¢ËáÐÔ»Æ34¡¢ËáÐÔ»Æ42¡¢ËáÐÔ»Æ76¡¢ËáÐÔ»Æ99¡¢ÜçËØ»ÆGG¡¢Allura Red AC¡¢ÜȲ˺졢Calcion¡¢Ö¥¼Ó¸çÌìÀ¶6B¡¢¸õ±äËØ2B¡¢¸õ±äËØ2R¡¢¼îÐԾճȡ¢¸Õ¹ûºì¡¢Ö±½ÓÀ¶71¡¢Ö±½Óºì23¡¢Ö±½Óºì75¡¢Ö±½Óºì80¡¢Ö±½Óºì81¡¢Ö±½Ó×Ï51¡¢Ö±½Ó»Æ50¡¢Ö±½Ó»Æ62¡¢·ÖÉ¢ºì1¡¢·ÖÉ¢ºì19¡¢·ÖÉ¢»Æ3¡¢Ñòë¸õÀ¶ºÚB¡¢Ñòë¸õºÚT¡¢°£ÎÄ˹À¶¡¢Ö¬ÈÜÐÔרRR¡¢¼ä°·»Æ¡¢ÝÁ·ÓÀ¶ºÚ¡¢Ïõົơ¢µªºì¡¢Ïõ»ùí¿Å¼µªIII¡¢ÈܼÁºì26ºÍÓͺìO¡£È¾ÁϵÄÒ»¸öÀý×ÓÊÇÈý±½»ù¼×Íé×ÅÉ«¼Á(Èç¿×ȸÂÌ¡¢½á¾§×Ï»òÆ·ºì)¡£
ȾÁϵÄÒ»¸öÀý×ÓÊǼÈÊÇ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐÖØµª»ùµÄȾÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£
ȾÁϵÄÒ»¸öÀý×ÓÊǼÈÊÇ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐôÇ»ù¡¢ÑÇÁòËá»ù»ò²®ÖÁÊå°±»ùµÄÖØµªÈ¾ÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£»¹Äܹ»Ê¹È¾ÁϾßÓÐÎȶ¨ÐÔ£¬ÒÔ¸üÎȶ¨µØ¼ì²â³ôÑõ¡£
×÷Ϊ½«È¾Áϵ¼Èë¶à¿×²ÄÁÏÖеÄÒ»ÖÖ·½·¨£¬ÓÃÈÜÒº½«È¾ÁϽþ×Õµ½¶à¿×²ÄÁÏÖУ¬È¾Áϵ¼Èë¿×Öкó¸ÉÔï¡£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏ¿ÉÒÔͨ¹ýÆøÏà³Á»ýµ¼Èë¿×ÖС£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏºÍÆäËü»¯ºÏÎï»ìºÏ£¬È»ºóÔÚÓÃÈܽºÄý½º·¨ÖÆ×÷¶à¿×²ÄÁÏʱ½«Æäµ¼Èë¿×ÖС£
¸ù¾ÝµÚÈý¸öʵʩ·½°¸£¬ÓÃÔÚ¶à¿×²ÄÁϵĿ×Öк¬ÓÐȾÁÏµÄÆøÃôÔª¼þ103a¿ÉÒÔÔö¼Ó´ý¼ì²âµÄ³ôÑõÆøÌåµÄÎü¸½Ãæ»ý¡£Ó봫ͳ·½·¨Ïà±È£¬ÆäÁéÃô¶ÈºÍÀÛ¼ÆÄÜÁ¦¾ùÓÐÌá¸ß£¬´Ó¶ø¿ÉÒÔʵÏÖÀÛ¼ÆÓ¦Óá£
µÚÈý¸öʵʩ·½°¸ÓÃÈýÒÒ´¼°·×÷ΪËáÐÔÆøÌåÎü¸½¼ÁµÄÒ»¸öÀý×Ó£¬Ò²¿ÉÒÔʹÓøÊÓÍ¡£
ÔÚµÚÈý¸öʵʩ·½°¸ÖУ¬¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶Ò²ÓÅÑ¡ÊÇ20nm»ò¸üС¡£
µÚËĸöʵʩ·½°¸ÏÂÃæËµÃ÷±¾·¢Ã÷µÚËĸöʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þ¡£
ÏÂÃæÃèÊöµÚËĸöʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þµÄÖÆ×÷·½·¨¡£
Èçͼ1AËùʾ£¬½«×÷ΪȾÁÏ(×ÅÉ«¼Á)µÄ¶þºÅ³ÈÈܽâÔÚË®ÖУ¬ÖƱ¸ÈÜÒº¡£¶þºÅ³ÈµÄŨ¶ÈÊÇ0.2£¥¡£½«²¶¼¯ºÍ¼ì²âÈÜҺʢ·ÅÔÚÈÝÆ÷102ÖС£Èçͼ1BËùʾ£¬Ê¹Æ½¾ù¿×¾¶Îª4nmµÄ¶à¿×²ÄÁϽþÅÝÔ¼2Сʱ¡£¶à¿×²ÄÁÏÓëµÚÒ»¸öʵʩ·½°¸ÖÐËùÊöµÄÏàͬ£¬ÊÇÓùº×ÔCorningµÄVycor 7930ÖÆ³ÉµÄ¡£¶à¿×²ÄÁÏµÄÆ¬³ß´çΪ8(mm)¡Á8(mm)£¬ºñ¶ÈΪ1(mm)¡£
¶à¿×²ÄÁϽþÅÝÔÚÈÜÒºÖУ¬Ê¹ÈÜÒº½þÈë¶à¿×²ÄÁϵĿ×ÖС£ÓÃÈÜÒº½þÅݺóµÄ¶à¿×²ÄÁÏ´ÓÈÜÒºÖÐÈ¡³ö£¬½øÐÐ¿ÕÆø¸ÉÔȻºóÔÚµªÆøÆøÁ÷ÖиÉÔï°ëÌ죬´Ó¶øÐγɵÚËĸöʵʩ·½°¸µÄÆøÃôÔª¼þ¡£
µ±ÖÆ×÷µÄÆøÃôÔª¼þ±©Â¶ÔÚ³ôÑõŨ¶ÈΪ100ppbµÄ¿ÕÆøÖÐʱ£¬¿ÉÒԹ۲쵽³ÈÉ«ÏûÍË¡£ÓÃÎüÊռƲâÁ¿ÕâÖֱ仯¡£
ÏÂÃæ²Î¿¼Í¼9˵Ã÷µÚËĸöʵʩ·½°¸µÄÆøÃôÔª¼þµÄÎü¹âÂʲâÁ¿½á¹û¡£ÔÚͼ9ÖУ¬ÐéÏß±íʾ³õʼ°µ³ÈÉ«µÄÆøÃôÔª¼þµÄ²âÁ¿½á¹û£¬ÊµÏß±íʾÍÊÉ«ºóµÄÆøÃôÔª¼þµÄ²âÁ¿½á¹û¡£ÕâÖֱ仯ÊDz»¿ÉÄæµÄ¡£³ôÑõŨ¶ÈÔÚ100ppb-1ppm¼ä±ä»¯£¬¶øÆ×ͼ±ä»¯¼¸ºõÒ»Ñù£¬Ö»ÊÇÎü¹âÇ¿¶ÈÓÐËù²»Í¬¡£
ͼ10ʾ³öÆøÃôÔª¼þ±©Â¶ÔÚ³ôÑõŨ¶ÈԼΪ20ppbµÄ¿ÕÆøÖÐʱµÄÎü¹âÂÊ¡£ÔÚͼ10ÖУ¬ÐéÏß±íʾ³õʼ°µ³ÈÉ«µÄÆøÃôÔª¼þµÄ²âÁ¿½á¹û£¬ÊµÏß±íʾÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖб©Â¶ºóµÄ²âÁ¿½á¹û¡£ÕâÖֱ仯ҲÊDz»¿ÉÄæµÄ¡£
Èçͼ10Ëùʾ£¬µÚËĸöʵʩ·½°¸µÄÆøÃôÔª¼þÔÚÔ¼510nm²¨³¤´¦µÄÎü¹âÂʽµµÍ¡£¼´Ê¹Ê¹ÓõÚËĸöʵʩ·½°¸µÄÆøÃôÔª¼þ£¬Ò²Äܹ»¼ì²â³ôÑõÆøÌå¡£»¹¿ÉÒÔ¼ì²â¿ÕÆøÖеijôÑõÆøÌå¡£
µÚËĸöʵʩ·½°¸ÓöþºÅ³È×÷ΪȾÁϵÄÀý×Ó¡£È¾ÁϵÄÀý×ÓÓÐÒ»ºÅ³È¡¢³ÈG¡¢¼×»ù³È¡¢ÙÂ˹Âóר¡¢¼×»ù»Æ¡¢ËáÐÔ¸õ×ÏK¡¢²Ø»¨³ÈG¡¢¸õ±äËØFB¡¢ÐÂëÙÖ¬¡¢½á¾§Ðɺ졢ÜçËØÀ¶ºÚR¡¢Plasmocorinth B¡¢ËÕµ¤II¡¢ËÕµ¤III¡¢ËÕµ¤IV¡¢ËÕµ¤ºìB¡¢ËÕµ¤ºì7B¡¢Ííϼ»ÆFCF¡¢¼×±½°·ºì¡¢½ðÁ«³ÈO¡¢¶þ¼×´ú±½°·Àö´ººì2R¡¢Ð¿Ò»ÄÆÑΡ¢±½²¢ºì×Ï4B¡¢Biebrich Scarlet Red¡¢ÔæºìR¡¢ÁÁ²Ø»¨¾«MOO¡¢2-(5-äå-2-ßÁऻùżµª)-5-(¶þÒÒ»ù°±»ù)±½·Ó¡¢6¡¯-¶¡Ñõ»ù-2£¬6-¶þ°±»ù-3£¬3¡¯-żµª¶þßÁड¢ËáÐÔºÚ24¡¢ËáÐÔÀ¶29¡¢ËáÐÔÀ¶92¡¢ËáÐÔÀ¶113¡¢ËáÐÔÀ¶120¡¢ËáÐÔ³È8¡¢ËáÐÔ³È51¡¢ËáÐÔ³È63¡¢ËáÐÔ³È74¡¢ËáÐÔºì1¡¢ËáÐÔºì4¡¢ËáÐÔºì8¡¢ËáÐÔºì37¡¢ËáÐÔºì97¡¢ËáÐÔºì114¡¢ËáÐÔºì151¡¢ËáÐÔºì183¡¢ËáÐÔ×Ï7¡¢ËáÐÔ»Æ17¡¢ËáÐÔ»Æ25¡¢ËáÐÔ»Æ29¡¢ËáÐÔ»Æ34¡¢ËáÐÔ»Æ42¡¢ËáÐÔ»Æ76¡¢ËáÐÔ»Æ99¡¢ÜçËØ»ÆGG¡¢Allura Red AC¡¢ÜȲ˺졢Calcion¡¢Ö¥¼Ó¸çÌìÀ¶6B¡¢¸õ±äËØ2B¡¢¸õ±äËØ2R¡¢¼îÐԾճȡ¢¸Õ¹ûºì¡¢Ö±½ÓÀ¶71¡¢Ö±½Óºì23¡¢Ö±½Óºì75¡¢Ö±½Óºì80¡¢Ö±½Óºì81¡¢Ö±½Ó×Ï51¡¢Ö±½Ó»Æ50¡¢Ö±½Ó»Æ62¡¢·ÖÉ¢ºì1¡¢·ÖÉ¢ºì19¡¢·ÖÉ¢»Æ3¡¢Ñòë¸õÀ¶ºÚB¡¢Ñòë¸õºÚT¡¢°£ÎÄ˹À¶¡¢Ö¬ÈÜÐÔרRR¡¢¼ä°·»Æ¡¢ÝÁ·ÓÀ¶ºÚ¡¢Ïõົơ¢µªºì¡¢Ïõ»ùí¿Å¼µªIII¡¢ÈܼÁºì26ºÍÓͺìO¡£È¾ÁϵÄÒ»¸öÀý×ÓÊǼÈÊÇ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐÖØµª»ùµÄȾÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£
ȾÁϵÄÒ»¸öÀý×ÓÊǺ¬ÓмÈÊǾßÓÐÖØµª»ùµÄ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐôÇ»ù¡¢ÑÇÁòËá»ù»ò²®ÖÁÊå°±»ùµÄȾÁϵÄÖØµªÈ¾ÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£»¹Äܹ»Ê¹È¾ÁϾßÓÐÎȶ¨ÐÔ£¬ÒÔ¸üÎȶ¨µØ¼ì²â³ôÑõ¡£
×÷Ϊ½«È¾Áϵ¼Èë¶à¿×²ÄÁϵĿ×ÖеÄÒ»ÖÖ·½·¨£¬Óò¶¼¯ºÍ¼ì²âÈÜÒº½«È¾ÁϽþ×Õµ½¶à¿×²ÄÁÏÖУ¬È¾Áϵ¼Èë¿×Öкó¸ÉÔï¡£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏ¿ÉÒÔͨ¹ýÆøÏà³Á»ýµ¼Èë¿×ÖС£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏºÍÆäËü»¯ºÏÎï»ìºÏ£¬È»ºóÔÚÓÃÈܽºÄý½º·¨ÖÆ×÷¶à¿×²ÄÁÏʱ½«Æäµ¼Èë¿×ÖС£
¸ù¾ÝµÚËĸöʵʩ·½°¸£¬ÓÃÔÚ¶à¿×²ÄÁϵĿ×Öк¬ÓÐȾÁÏµÄÆøÃôÔª¼þ103a¿ÉÒÔÔö¼Ó´ý¼ì²âµÄ³ôÑõÆøÌåµÄÎü¸½Ãæ»ý¡£Ó봫ͳ·½·¨Ïà±È£¬ÆäÁéÃô¶ÈºÍÀÛ¼ÆÄÜÁ¦¾ùÓÐÌá¸ß£¬´Ó¶ø¿ÉÒÔʵÏÖÀÛ¼ÆÓ¦Óá£
ÔÚµÚËĸöʵʩ·½°¸ÖУ¬¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶Ò²ÓÅÑ¡ÊÇ20nm»ò¸üС¡£
µÚÎå¸öʵʩ·½°¸ÏÂÃæËµÃ÷±¾·¢Ã÷µÚÎå¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þ¡£
ÏÂÃæÃèÊöµÚÎå¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þµÄÖÆ×÷·½·¨¡£
Èçͼ1AËùʾ£¬½«×÷ΪȾÁÏ(×ÅÉ«¼Á)µÄµåÀ¶ëÙÖ¬ºì¶þÄÆÑÎÈܽâÔÚË®ÖУ¬È»ºó¼ÓÈë×÷ΪËáµÄÑÎËᣬÒÔ´ËÖÆ±¸0.3£¥µåÀ¶ëÙÖ¬ºì¶þÄÆÑκÍ1NÑÎËáµÄË®ÈÜÒº£¬½«Æä×÷ΪÈÜÒº101¡£ÈÜÒº101Ê¢·ÅÔÚÈÝÆ÷102ÖС£
Èçͼ1BËùʾ£¬½«¶à¿×²ÄÁÏ103½þÅÝÔÚÈÜÒº101ÖС£¶à¿×²ÄÁÏ103µÄÒ»¸öÀý×ÓÊÇÆ½¾ù¿×¾¶Îª4nmµÄ¶à¿×²£Á§¡£¶à¿×²ÄÁÏ103ÓëµÚÒ»¸öʵʩ·½°¸ÖÐËùÊöµÄÏàͬ£¬ÊÇÓùº×ÔCorningµÄVycor 7930ÖÆ³ÉµÄ¡£¶à¿×²ÄÁÏµÄÆ¬³ß´çΪ8(mm)¡Á8(mm)£¬ºñ¶ÈΪ1(mm)¡£
¶à¿×²ÄÁÏ103ÔÚÈÜÒº101ÖнþÅÝ24Сʱ£¬ÓÃÈÜÒº101½þ×Õ¶à¿×²ÄÁÏ103µÄ¿×¡£ÓÃÈÜÒº101½þÅݺóµÄ¶à¿×²ÄÁÏ´ÓÈÜÒºÖÐÈ¡³ö£¬½øÐÐ¿ÕÆø¸ÉÔï¡£Èçͼ1CËùʾ£¬¶à¿×²ÄÁÏÔÚµªÆøÆøÁ÷ÖиÉÔï24Сʱ»ò¸ü³¤Ê±¼ä£¬´Ó¶øÐγɵÚÎå¸öʵʩ·½°¸µÄÆøÃôÔª¼þ103a¡£
Èçͼ1DËùʾ£¬²âÁ¿ÆøÃôÔª¼þ103aÔÚºñ¶È·½ÏòÉϵÄÎü¹âÂÊ¡£ÔÚͼ1EÖУ¬ÆøÃôÔª¼þ103aÔÚ³ôÑõŨ¶ÈÀýÈçΪ20ppbµÄ²âÁ¿Ä¿±ê¿ÕÆø104Öб©Â¶2Сʱ¡£È»ºó½«ÆøÃôÔª¼þ103a´Ó²âÁ¿Ä¿±ê¿ÕÆø104ÖÐÈ¡³ö¡£Èçͼ1FËùʾ£¬ÔٴβâÁ¿ÆøÃôÔª¼þ103aÔÚºñ¶È·½ÏòÉϵÄÎü¹âÂÊ¡£
ÏÂÃæ²Î¿¼Í¼11½âÊÍÁ½´ÎÎü¹âÂʵIJâÁ¿½á¹û(Îü¹âÂÊ·ÖÎöÖµ)¡£Í¸Éä¹â²âÁ¿²¨³¤Îª350nm»ò¸üСʱûÓвâÁ¿Îü¹âÂÊ£¬ÒòΪ¹âÏß±»¹¹³ÉÆøÃôÔª¼þµÄ¶à¿×²£Á§(Vycor 7930)ÎüÊÕ¡£
ÔÚͼ11ÖУ¬ÐéÏß±íʾ±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐ֮ǰµÄÎü¹âÂÊ£¬ÊµÏß±íʾ±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐÒÔºóµÄÎü¹âÂÊ¡£²¨³¤·¶Î§Îª500nm-700nm£¬ÌرðÊÇ600nm¸½½ü·¢ÏÖʵÏߺÍÐéÏßÓкܴó²îÒì¡£ÔÚ²âÁ¿±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐÒÔºóµÄÎü¹âÂÊʱ£¬ÔÚ600nm²¨³¤´¦Îü¹âÂÊϽµ¡£¿ÉÒÔÈÏΪÎü¹âÂʵÄϽµÊÇÒòΪµ±ÆøÃôÔª¼þ±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐʱ£¬ÆøÃôÔª¼þÖеÄȾÁϷֽ⣬Éú³Éеķֽâ²úÆ·¡£ÕâÖÖ²úÆ·¿ÉÒÔÈÏΪÊǵåÀ¶ëÙÖ¬ºì¶þÄÆÑεķÖ×ӹǼÜÖк¬ÓеÄC£½C¼ü·Ö½âËù²úÉúµÄ¡£
²¶¼¯ºÍ¼ì²âÈÜÒºÖÐûÓмÓÈëÑÎËáʱµÄÆøÃôÔª¼þÔÚ600nm´¦µÄÎü¹âÂÊÊÇÈÜÒºÖмÓÈëÑÎËáʱµÄÆøÃôÔª¼þÔÚ600nm´¦µÄÎü¹âÂʵÄ1/100¡£¿ÉÒÔÈÏΪÐí¶àȾÁÏ×é·Ö½øÈëÁ˶à¿×²ÄÁÏ¡£
Èçͼ3Ëùʾ£¬ÓÃÉÏÊöÉú²ú·½·¨ÖÆ×÷µÄÆøÃôÔª¼þ×÷Ϊ¾ßÓÐ͸Ã÷»ùÌåÐÎ×´µÄÎü¸½¼Á£¬ÆäÖÐÓÐÐí¶àƽ¾ù¿×¾¶ÀýÈçΪ20nm»ò¸üСµÄ¿×301¡£¶à¿×²ÄÁÏ305ÖеÄÖÁÉÙһЩ¿×301Óë¶à¿×²ÄÁϱíÃæÉϵĿ׿ÁªÔÚÒ»Æð¡£È¾ÁϳÁ»ýÔÚÆøÃôÔª¼þ302µÄ¿×301ÖС£¶à¿×²ÄÁϱ©Â¶ÔÚ¿ÕÆøÖУ¬È»ºó¿ÕÆøÖеÄË®·ÖÎü¸½ÔÚ¿×ÖУ¬Ðγɺܱ¡µÄˮĤ¡£½á¹û¿ÉÒÔÈÏΪÆäÖÐÈܽâÓÐȾÁϵÄË®ÈÜÒº(²¶¼¯ºÍ¼ì²âÈÜÒº)±¡Ä¤303ÐγÉÔÚÆøÃôÔª¼þ302µÄ¿×301µÄÄÚ±ÚÉÏ¡£ÒòΪÖÁÉÙһЩ¿×301Óë¶à¿×²ÄÁϱíÃæÉϵĿ׿ÁªÔÚÒ»Æð£¬ËùÒÔ¿ÉÒÔÈÏΪÖÁÉÙһЩ¿×ÖгÁ»ýÓÐȾÁÏ¡£
½øÈëÆøÃôÔª¼þ302µÄ¿×301ÖеijôÑõ·Ö×Ó304ÓëȾÁÏ·´Ó¦£¬·Ö½â̼̼˫¼ü¡£¼´£¬ÔÚ·Ö×ÓÉÏÉìÕ¹µÄ¦Ðµç×Óϵͳ¶ÏÁѳÉÁ½¸ö»ò¶à¸öƬ¶Î¡£·ÖÁѵķÖ×ÓÔÚ600nm¸½½ü²»ÎüÊÕÈκιâÏߣ¬Òò´ËÆøÃôÔª¼þµÄÑÕÉ«¼õÈõ¡£¼´£¬È¾ÁϺͳôÑõ·¢ÉúÍÊÉ«·´Ó¦¡£ÒòΪÖÁÉÙһЩ¿×301Óë¶à¿×²ÄÁϱíÃæÉϵĿ׿ÁªÔÚÒ»Æð£¬ËùÒÔ¿ÉÒÔÈÏΪ³ôÑõÆøÌåÓëÖÁÉÙһЩ¿×ÖгÁ»ýµÄȾÁÏ·¢Éú·´Ó¦¡£
ÀýÈçͨ¹ýÓ÷ֹâ¹â¶È¼Æ(ÎüÊÕ¼Æ)²âÁ¿ÎüÊÕ¹âÆ×¿ÉÒÔ¶¨Á¿¼ì²â·Ö½âµÄ·Ö×Ó¡£Í¨¹ý¶¨Á¿¼ì²â¿ÉÒÔ¼ä½Ó²âÁ¿³ôÑõÆøÌå¡£
ÀýÈ磬¶à¿×²ÄÁÏÊÇÓÃÄܹ»´«ÊäȾÁϹâÎüÊÕ²¨³¤·¶Î§ÄڵĹâÏߵIJÄÁÏÖÆ³ÉµÄ¡£²âÁ¿Îü¸½³ôÑõÆøÌåµÄÆøÃôÔª¼þµÄ¹âÎüÊÕÐÔÄÜ¡£Í¨¹ý²âÁ¿¹âÎüÊÕÐÔÄÜ¿ÉÒÔ¼ì²âÎü¸½µÄ³ôÑõÆøÌå¡£
ÓëµÚÒ»¸öʵʩ·½°¸ÖÐËùÊöµÄÀàËÆ£¬²âÁ¿Îü¹âÂÊʱ½«µÚÎå¸öʵʩ·½°¸µÄÆøÃôÔª¼þ103a¹Ì¶¨ÔÚÎüÊռƵı¡Ä¤²âÁ¿Ö§¼ÜÉÏ¡£µÃµ½²âÁ¿Îü¹âÂÊʱµÄÎü¹âÂʲîÖµºÍŨ¶ÈµÄ¹ØÏµ¾Í¿ÉÒÔ¶¨Á¿¼ì²âppb¼¶µÄ³ôÑõŨ¶È¡£
ÈçµÚÒ»¸öʵʩ·½°¸ËùÊö£¬½«µÃµ½µÄµ¥Î»±©Â¶Á¿(Ũ¶È(ppb)¡Á±©Â¶Ê±¼ä(h))µÄ×î´óÎüÊÕ²¨³¤´¦Îü¹âÂʵı仯ֵ×÷ΪÁéÃô¶ÈÖ¸Êý¡£Èçͼ11Ëùʾ£¬ÔÚ20ppbµÄ³ôÑõÆøÌåÖб©Â¶2СʱºóµÄÎü¹âÂʱ仯ֵÊÇ0.009¡£ÁéÃô¶ÈÖ¸ÊýÊÇ2.5¡Á10-4ppb-1.hr-1¡£´Ó¶ø¿ÉÒÔ´ïµ½·Ç³£¸ßµÄÁéÃô¶È¡£
ÈçÉÏËùÊö£¬ÔÚµÚÎå¸öʵʩ·½°¸ÖƱ¸µÄÆøÃôÔª¼þÖУ¬ËáÓëºÍ³ôÑõÆøÌ巴Ӧʱ¶Ô¿É¼ûÇøµÄÎü¹âÂÊ·¢Éú±ä»¯µÄȾÁϵĻìºÏÎï³Á»ýÔÚ͸Ã÷¶à¿×²ÄÁϵĿ×ÖС£¿ÉÒÔÈÏΪµ±ÆøÃôÔª¼þ±©Â¶ÔÚº¬³ôÑõÆøÌåµÄ´óÆøÖÐʱ£¬Îü¸½ÔÚÆøÃôÔª¼þ¿×ÖеijôÑõÆøÌåʹȾÁÏÖеÄË«¼üÈçC£½C¶Ï¿ª£¬È¾ÁÏ·Ö×ӵĵç×Ó״̬·¢Éú±ä»¯£¬´Ó¶ø¸Ä±ä¿É¼ûÇøµÄÎüÊÕ¹âÆ×¡£Òò´Ë£¬µ±ÆøÃôÔª¼þµÄÑÕÉ«·¢Éú±ä»¯ÇÒµÚÒ»ºÍµÚ¶þ͸ÉäÂʲ»Í¬Ê±¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£
µÚÎå¸öʵʩ·½°¸ÓõåÀ¶ëÙÖ¬ºì¶þÄÆÑÎ×÷ΪȾÁϵÄÀý×Ó¡£È¾ÁϵÄÒ»¸öÀý×ÓÊǺ¬µåÀ¶µÄµåÇàÀà×ÅÉ«¼Á(ÈçµåÀ¶»òµåÀ¶ëÙÖ¬ºìÈý¼ØÑÎ)¡£
ȾÁϵÄÀý×ÓÓÐÒ»ºÅ³È¡¢¶þºÅ³È¡¢³ÈG¡¢¼×»ù³È¡¢ÙÂ˹Âóר¡¢¼×»ù»Æ¡¢ËáÐÔ¸õ×ÏK¡¢²Ø»¨³ÈG¡¢¸õ±äËØFB¡¢ÐÂëÙÖ¬¡¢½á¾§Ðɺ졢ÜçËØÀ¶ºÚR¡¢Plasmocorinth B¡¢ËÕµ¤II¡¢ËÕµ¤III¡¢ËÕµ¤IV¡¢ËÕµ¤ºìB¡¢ËÕµ¤ºì7B¡¢Ííϼ»ÆFCF¡¢¼×±½°·ºì¡¢½ðÁ«³ÈO¡¢¶þ¼×´ú±½°·Àö´ººì2R¡¢Ð¿Ò»ÄÆÑΡ¢±½²¢ºì×Ï4B¡¢Biebrich Scarlet Red¡¢ÔæºìR¡¢ÁÁ²Ø»¨¾«MOO¡¢2-(5-äå-2-ßÁऻùżµª)-5-(¶þÒÒ»ù°±»ù)±½·Ó¡¢6¡¯-¶¡Ñõ»ù-2£¬6-¶þ°±»ù-3£¬3¡¯-żµª¶þßÁड¢ËáÐÔºÚ24¡¢ËáÐÔÀ¶29¡¢ËáÐÔÀ¶92¡¢ËáÐÔÀ¶113¡¢ËáÐÔÀ¶120¡¢ËáÐÔ³È8¡¢ËáÐÔ³È51¡¢ËáÐÔ³È63¡¢ËáÐÔ³È74¡¢ËáÐÔºì1¡¢ËáÐÔºì4¡¢ËáÐÔºì8¡¢ËáÐÔºì37¡¢ËáÐÔºì97¡¢ËáÐÔºì114¡¢ËáÐÔºì151¡¢ËáÐÔºì183¡¢ËáÐÔ×Ï7¡¢ËáÐÔ»Æ17¡¢ËáÐÔ»Æ25¡¢ËáÐÔ»Æ29¡¢ËáÐÔ»Æ34¡¢ËáÐÔ»Æ42¡¢ËáÐÔ»Æ76¡¢ËáÐÔ»Æ99¡¢ÜçËØ»ÆGG¡¢Allura Red AC¡¢ÜȲ˺졢Calcion¡¢Ö¥¼Ó¸çÌìÀ¶6B¡¢¸õ±äËØ2B¡¢¸õ±äËØ2R¡¢¼îÐԾճȡ¢¸Õ¹ûºì¡¢Ö±½ÓÀ¶71¡¢Ö±½Óºì23¡¢Ö±½Óºì75¡¢Ö±½Óºì80¡¢Ö±½Óºì81¡¢Ö±½Ó×Ï51¡¢Ö±½Ó»Æ50¡¢Ö±½Ó»Æ62¡¢·ÖÉ¢ºì1¡¢·ÖÉ¢ºì19¡¢·ÖÉ¢»Æ3¡¢Ñòë¸õÀ¶ºÚB¡¢Ñòë¸õºÚT¡¢°£ÎÄ˹À¶¡¢Ö¬ÈÜÐÔרRR¡¢¼ä°·»Æ¡¢ÝÁ·ÓÀ¶ºÚ¡¢Ïõົơ¢µªºì¡¢Ïõ»ùí¿Å¼µªIII¡¢ÈܼÁºì26ºÍÓͺìO¡£È¾ÁϵÄÒ»¸öÀý×ÓÊǼÈÊÇ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐÖØµª»ùµÄȾÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£
ȾÁϵÄÒ»¸öÀý×ÓÊǺ¬ÓмÈÊǾßÓÐÖØµª»ùµÄ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐôÇ»ù¡¢ÑÇÁòËá»ù»ò²®ÖÁÊå°±»ùµÄȾÁϵÄÖØµªÈ¾ÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£»¹Äܹ»Ê¹È¾ÁϾßÓÐÎȶ¨ÐÔ£¬ÒÔ¸üÎȶ¨µØ¼ì²â³ôÑõ¡£
×÷Ϊ½«È¾Áϵ¼Èë¶à¿×²ÄÁϵĿ×ÖеÄÒ»ÖÖ·½·¨£¬ÓÃÈÜÒº½«È¾ÁϽþ×Õµ½¶à¿×²ÄÁÏÖУ¬È¾Áϵ¼Èë¿×Öкó¸ÉÔï¡£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏ¿ÉÒÔͨ¹ýÆøÏà³Á»ýµ¼Èë¿×ÖС£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏºÍÆäËü»¯ºÏÎï»ìºÏ£¬È»ºóÔÚÓÃÈܽºÄý½º·¨ÖÆ×÷¶à¿×²ÄÁÏʱ½«Æäµ¼Èë¿×ÖС£
¸ù¾ÝµÚÎå¸öʵʩ·½°¸£¬ÓÃÔÚ¶à¿×²ÄÁϵĿ×Öк¬ÓÐȾÁÏµÄÆøÃôÔª¼þ¿ÉÒÔÔö¼Ó´ý¼ì²âµÄ³ôÑõÆøÌåµÄÎü¸½Ãæ»ý¡£Ó봫ͳ·½·¨Ïà±È£¬ÆäÁéÃô¶ÈºÍÀÛ¼ÆÄÜÁ¦¾ùÓÐÌá¸ß£¬´Ó¶ø¿ÉÒÔʵÏÖÀÛ¼ÆÓ¦Óá£
¸ù¾ÝµÚÎå¸öʵʩ·½°¸£¬Èçͼ4Ëùʾ£¬ÆøÃôÔª¼þÔÚÔ¤¶¨²¨³¤´¦µÄ͸ÉäÂÊËæ¼ì²âÄ¿±êÆøÌåÖгôÑõÆøÌåŨ¶ÈµÄÔö¼Ó¶øÔö´ó¡£Ô¤¶¨²¨³¤Ô¼Îª600nm¡£
µÚÎå¸öʵʩ·½°¸Í¨¹ýʹÓÃСÐÍÆøÃôÔª¼þ103a¿ÉÒÔÓùâѧ±ä»¯¼ì²â³ôÑõÆøÌ壬¿ÉÒԷdz£ÈÝÒ׵ظ߾«¶È¼ì²â³ôÑõÆøÌå¡£ÔÚÎü¹âÂʲâÁ¿ÖУ¬Ö»ÓÐÒ»¸ö×ãÒÔ¼ì²âµÄµ¥·åÔڱ仯£¬Òò´ËÕâÖÖ²âÁ¿Ò×ÓÚ½øÐС£
µ±ÆøÃôÔª¼þÊÇÓöà¿×²£Á§(Åð¹è²£Á§)ÖÆ³ÉµÄʱ£¬½«Æ½¾ù¿×¾¶ÉèÖÃΪ20nm»ò¸üС£¬ÔÚUV¿É¼û¹â²¨³¤Çø(²¨³¤200nm-2000nm)²âÁ¿Í¸Éä¹âÆ×ʱ¹âÏß¿ÉÒÔÔڿɼû¹âÇø(350nm-800nm)ÄÚ´«Êä¡£¶ÔÓڽϴóµÄƽ¾ù¿×¾¶À´Ëµ£¬Äܹ»¹Û²ìµ½¿É¼ûÇøµÄ͸ÉäÂÊͻȻϽµ¡£Òò´Ë£¬ÉÏÊö¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶ÓÅÑ¡ÊÇ20nm»ò¸üС¡£Í¸Ã÷¶à¿×²ÄÁÏÓÅÑ¡ÓÃÔÚ350nm-800nmµÄ¿É¼ûÇø¡£ÔÚµÚÎå¸öʵʩ·½°¸ÖУ¬¶à¿×²ÄÁϵıȱíÃæ»ýÊÇ100m2/g»ò¸ü´ó¡£
ÔÚµÚÎå¸öʵʩ·½°¸ÖУ¬ÖƱ¸ÈÜÒº101ʱ¼ÓÈëµÄËáÊÇÑÎËá¡£¿ÉÒÔʹÓÃÒÒËá¡¢ÁòËáºÍÁ×ËáÖеÄÈκÎÒ»ÖÖËá¡£
µÚÁù¸öʵʩ·½°¸ÏÂÃæËµÃ÷±¾·¢Ã÷µÚÁù¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þ¡£
ÏÂÃæÃèÊöµÚÁù¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þµÄÖÆ×÷·½·¨¡£
Èçͼ1AËùʾ£¬½«×÷ΪȾÁÏ(×ÅÉ«¼Á)µÄµåÀ¶ëÙÖ¬ºì¶þÄÆÑΡ¢ÑÎËáºÍ×÷ΪËáÐÔÆøÌåÎü¸½¼ÁµÄ¸ÊÓÍÈܽâÔÚË®ÖУ¬ÖƱ¸ÈÜÒº¡£µåÀ¶ëÙÖ¬ºì¶þÄÆÑεÄŨ¶ÈÊÇ0.4£¥£¬ÑÎËáµÄŨ¶ÈÊÇ1N£¬¸ÊÓ͵ÄŨ¶ÈÊÇ1.0£¥¡£
Èçͼ1BËùʾ£¬Ê¹Æ½¾ù¿×¾¶Îª4nmµÄ¶à¿×²ÄÁϽþÅÝÔÚȾÁÏÈÜÒºÖС£¶à¿×²ÄÁÏÓëµÚÒ»¸öʵʩ·½°¸ÖÐËùÊöµÄÏàͬ£¬ÊÇÓùº×ÔCorningµÄVycor7930ÖÆ³ÉµÄ¡£¶à¿×²ÄÁÏµÄÆ¬³ß´çΪ8(mm)¡Á8(mm)£¬ºñ¶ÈΪ1(mm)¡£
¶à¿×²ÄÁÏÔÚȾÁÏÈÜÒºÖнþÅÝ24Сʱ£¬ÓÃȾÁÏÈÜÒº½þ×Õ¶à¿×²ÄÁϵĿס£È»ºó½«¶à¿×²ÄÁÏ¿ÕÆø¸ÉÔï¡£¶à¿×²ÄÁÏÔÚµªÆøÆøÁ÷ÖиÉÔïÒ»Ì죬´Ó¶øÐγɵÚÁù¸öʵʩ·½°¸µÄÆøÃôÔª¼þ¡£
²âÁ¿ÓÃÕâÖÖ·½·¨ÖÆ×÷µÄµÚÁù¸öʵʩ·½°¸µÄÆøÃôÔª¼þµÄÎü¹âÂÊ¡£
ÏÂÃæ²Î¿¼Í¼12˵Ã÷µÚÁù¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖб©Â¶Ç°ºóµÄÎüÊÕ¹âÆ×¡£ÔÚͼ12ÖУ¬ÐéÏß±íʾ±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐ֮ǰµÄÎüÊÕ¹âÆ×£¬ÊµÏß±íʾÔÚ³ôÑõŨ¶ÈΪ100ppbµÄ¿ÕÆøÖб©Â¶2СʱºóµÄÎüÊÕ¹âÆ×¡£
Èçͼ12Ëùʾ£¬ÊµÏß±íʾµÄµÚÁù¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚÔ¼600nm²¨³¤´¦µÄÎü¹âÂʽµµÍ¡£½µµÍֵԼΪ0.05£¬´Ó¶ø¿ÉÒÔ¸ßÁéÃô¶ÈµØ¼ì²âppb¼¶µÄ³ôÑõÆøÌå¡£
ÔÚÉÏÊöÖÆ×÷·½·¨ÖУ¬ÖÆ×÷¶Ô±ÈÆøÃôÔª¼þ£¬Ö»ÊÇûÓÐʹÓøÊÓÍ¡£ÓÃ¶Ô±ÈÆøÃôÔª¼þÑо¿×÷ΪËáÐÔÆøÌåµÄNO2µÄ¸ÉÈÅËù²úÉúµÄÓ°Ïì¡£½á¹û¹Û²ìµ½NO2¶Ô¶Ô±ÈÆøÃôÔª¼þÓиÉÈÅ£¬¶øÔÚµÚÁù¸öʵʩ·½°¸µÄÆøÃôÔª¼þÖй۲첻µ½NO2ÓÐÈκθÉÈÅ¡£
ÈçÉÏËùÊö£¬ÔÚµÚÁù¸öʵʩ·½°¸ÖƱ¸µÄÆøÃôÔª¼þÖУ¬Ëá¡¢¸ÊÓÍÓëºÍ³ôÑõÆøÌ巴Ӧʱ¶Ô¿É¼ûÇøµÄÎü¹âÂÊ·¢Éú±ä»¯µÄȾÁϵĻìºÏÎï³Á»ýÔÚ͸Ã÷¶à¿×²ÄÁϵĿ×ÖС£¿ÉÒÔÈÏΪµ±ÆøÃôÔª¼þ±©Â¶ÔÚº¬³ôÑõÆøÌåºÍÐí¶à·Ç³ôÑõÆøÌåµÄËáÐÔÆøÌåµÄ´óÆøÖÐʱ£¬Îü¸½ÔÚÆøÃôÔª¼þ¿×ÖеijôÑõÆøÌåʹȾÁϺ¬ÓеĵåÀ¶»·ÖеÄ̼̼˫¼ü¶Ï¿ª£¬ÆøÃôÔª¼þ²»ÊÜËáÐÔÆøÌåµÄ¸ÉÈÅ£¬È¾ÁÏ·Ö×ӵĵç×Ó״̬·¢Éú±ä»¯£¬´Ó¶ø¸Ä±ä¿É¼ûÇøµÄÎüÊÕ¹âÆ×¡£Òò´Ë£¬µ±ÆøÃôÔª¼þµÄÑÕÉ«·¢Éú±ä»¯ÇÒµÚÒ»ºÍµÚ¶þ͸ÉäÂʲ»Í¬Ê±¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£
µÚÁù¸öʵʩ·½°¸ÓõåÀ¶ëÙÖ¬ºì¶þÄÆÑÎ×÷ΪȾÁϵÄÀý×Ó¡£È¾ÁϵÄÒ»¸öÀý×ÓÊǺ¬µåÀ¶µÄµåÇàÀà×ÅÉ«¼Á(ÈçµåÀ¶»òµåÀ¶ëÙÖ¬ºìÈý¼ØÑÎ)¡£
×÷Ϊ½«È¾Áϵ¼Èë¶à¿×²ÄÁϵĿ×ÖеÄÒ»ÖÖ·½·¨£¬ÓÃ×÷ΪÈÜÒºµÄȾÁϽþ×Õ¶à¿×²ÄÁÏ£¬È»ºó¸ÉÔï¡£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏ¿ÉÒÔͨ¹ýÆøÏà³Á»ýµ¼Èë¿×ÖС£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏºÍÆäËü»¯ºÏÎï»ìºÏ£¬È»ºóÔÚÓÃÈܽºÄý½º·¨ÖÆ×÷¶à¿×²ÄÁÏʱ½«Æäµ¼Èë¿×ÖС£
¸ù¾ÝµÚÁù¸öʵʩ·½°¸£¬ÓÃÔÚ¶à¿×²ÄÁϵĿ×Öк¬ÓÐȾÁÏµÄÆøÃôÔª¼þ¿ÉÒÔÔö¼Ó´ý¼ì²âµÄ³ôÑõÆøÌåµÄÎü¸½Ãæ»ý¡£Ó봫ͳ·½·¨Ïà±È£¬ÆäÁéÃô¶ÈºÍÀÛ¼ÆÄÜÁ¦¾ùÓÐÌá¸ß£¬´Ó¶ø¿ÉÒÔʵÏÖÀÛ¼ÆÓ¦Óá£
ÔÚµÚÁù¸öʵʩ·½°¸ÖУ¬¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶Ò²ÓÅÑ¡ÊÇ20nm»ò¸üС¡£
ÔÚµÚÁù¸öʵʩ·½°¸ÖУ¬¼ÓÈëµÄËáÐÔÆøÌåÎü¸½¼ÁÊǸÊÓÍ£¬¿ÉÒÔÓÃÈýÒÒ´¼°·´úÌæ¸ÊÓÍ¡£
µÚÆß¸öʵʩ·½°¸ÏÂÃæËµÃ÷±¾·¢Ã÷µÚÆß¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þ¡£
ÏÂÃæÃèÊöµÚÆß¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þµÄÖÆ×÷·½·¨¡£
Èçͼ1AËùʾ£¬½«×÷ΪȾÁÏ(×ÅÉ«¼Á)µÄµåÀ¶ëÙÖ¬ºì¶þÄÆÑΡ¢×÷ΪËáµÄÒÒËáºÍ×÷ΪÎüʪ»¯ºÏÎïµÄ¸ÊÓÍÈܽâÔÚË®ÖУ¬ÖƱ¸È¾ÁÏÈÜÒº¡£µåÀ¶ëÙÖ¬ºì¶þÄÆÑεÄŨ¶ÈÊÇ0.4£¥£¬ÒÒËáµÄŨ¶ÈÊÇ1N£¬¸ÊÓ͵ÄŨ¶ÈÊÇ10.0£¥¡£
Èçͼ1BËùʾ£¬Ê¹Æ½¾ù¿×¾¶Îª4nmµÄ¶à¿×²ÄÁϽþÅÝÔÚȾÁÏÈÜÒºÖС£¶à¿×²ÄÁÏÓëµÚÒ»¸öʵʩ·½°¸ÖÐËùÊöµÄÏàͬ£¬ÊÇÓùº×ÔCorningµÄVycor7930ÖÆ³ÉµÄ¡£¶à¿×²ÄÁÏµÄÆ¬³ß´çΪ8(mm)¡Á8(mm)£¬ºñ¶ÈΪ1(mm)¡£¶à¿×²ÄÁÏÔÚȾÁÏÈÜÒºÖнþÅÝ24Сʱ£¬ÓÃȾÁÏÈÜÒº½þ×Õ¶à¿×²ÄÁϵĿס£È»ºó½«¶à¿×²ÄÁÏ¿ÕÆø¸ÉÔï¡£¶à¿×²ÄÁÏÔÚµªÆøÆøÁ÷ÖиÉÔïÒ»Ì죬´Ó¶øÐÎ³ÉµÚÆß¸öʵʩ·½°¸µÄÆøÃôÔª¼þ¡£
ÏÂÃæ²Î¿¼Í¼13˵Ã÷µÚÆß¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖб©Â¶Ç°ºóµÄÎüÊÕ¹âÆ×¡£ÔÚͼ13ÖУ¬ÐéÏß±íʾ±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐ֮ǰµÄÎüÊÕ¹âÆ×£¬ÊµÏß±íʾµÚÆß¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ³ôÑõŨ¶ÈΪ100ppbµÄ¿ÕÆøÖб©Â¶2СʱºóµÄÎüÊÕ¹âÆ×¡£
ÔÚµÚÆß¸öʵʩ·½°¸ÖУ¬Èçͼ13Ëùʾ£¬ÊµÏßÏÔʾÔÚÔ¼600nm²¨³¤´¦µÄÎü¹âÂʽµµÍ¡£½µµÍֵԼΪ0.05£¬´Ó¶ø¿ÉÒÔ¸ßÁéÃô¶ÈµØ¼ì²âppb¼¶µÄ³ôÑõÆøÌå¡£
ÔÚÉÏÊöÖÆ×÷·½·¨ÖУ¬ÖÆ×÷¶Ô±ÈÆøÃôÔª¼þ£¬Ö»ÊÇûÓÐʹÓøÊÓÍ¡£ÓÃ¶Ô±ÈÆøÃôÔª¼þÑо¿Êª¶È±ä»¯µÄ¸ÉÈÅËù²úÉúµÄÓ°Ïì¡£½á¹û¹Û²ìµ½Êª¶È¶Ô¶Ô±ÈÆøÃôÔª¼þÓиÉÈÅ£¬¶øÔÚµÚÆß¸öʵʩ·½°¸µÄÆøÃôÔª¼þÖм¸ºõ¹Û²ì²»µ½ÈκθÉÈÅ¡£
ÈçÉÏËùÊö£¬ÔÚµÚÆß¸öʵʩ·½°¸ÖƱ¸µÄÆøÃôÔª¼þÖУ¬Ëá¡¢Îüʪ»¯ºÏÎïÓëºÍ³ôÑõÆøÌ巴Ӧʱ¶Ô¿É¼ûÇøµÄÎü¹âÂÊ·¢Éú²»¿ÉÄæ±ä»¯µÄȾÁϳÁ»ýÔÚ͸Ã÷¶à¿×²ÄÁϵĿ×ÖС£¿ÉÒÔÈÏΪµ±ÆøÃôÔª¼þ±©Â¶ÔÚº¬³ôÑõÆøÌåµÄ´óÆøÖÐʱ£¬Îü¸½ÔÚÆøÃôÔª¼þ¿×ÖеijôÑõÆøÌåʹȾÁÏÖеÄË«¼üÈçC£½C¶Ï¿ª£¬È¾ÁÏ·Ö×ӵĵç×Ó״̬·¢Éú±ä»¯£¬´Ó¶ø¸Ä±ä¿É¼ûÇøµÄÎüÊÕ¹âÆ×¡£
µ±ÆøÃôÔª¼þµÄÑÕÉ«·¢Éú±ä»¯ÇÒµÚÒ»ºÍµÚ¶þ͸ÉäÂʲ»Í¬Ê±¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£
ÒòΪÎüʪ»¯ºÏÎﺬÓÐË®£¬ËùÒÔ¼´Ê¹¼ÓÈëË®·Ö£¬Êª¶È±ä»¯²úÉúµÄÓ°ÏìÒ²ºÜС¡£Òò´Ë¿ÉÒÔ¼õСʪ¶ÈµÄ¸ÉÈÅ¡£
µÚÆß¸öʵʩ·½°¸ÒÑÓõåÀ¶ëÙÖ¬ºì¶þÄÆÑÎ×÷ΪȾÁϵÄÀý×Ó¡£È¾ÁϵÄÒ»¸öÀý×ÓÊǺ¬µåÀ¶»·µÄµåÇàÀà×ÅÉ«¼Á(ÈçµåÀ¶»òµåÀ¶ëÙÖ¬ºìÈý¼ØÑÎ)¡£
ȾÁϵÄÀý×ÓÓÐÒ»ºÅ³È¡¢¶þºÅ³È¡¢³ÈG¡¢¼×»ù³È¡¢ÙÂ˹Âóר¡¢¼×»ù»Æ¡¢ËáÐÔ¸õ×ÏK¡¢²Ø»¨³ÈG¡¢¸õ±äËØFB¡¢ÐÂëÙÖ¬¡¢½á¾§Ðɺ졢ÜçËØÀ¶ºÚR¡¢Plasmocorinth B¡¢ËÕµ¤II¡¢ËÕµ¤III¡¢ËÕµ¤IV¡¢ËÕµ¤ºìB¡¢ËÕµ¤ºì7B¡¢Ííϼ»ÆFCF¡¢¼×±½°·ºì¡¢½ðÁ«³ÈO¡¢¶þ¼×´ú±½°·Àö´ººì2R¡¢Ð¿Ò»ÄÆÑΡ¢±½²¢ºì×Ï4B¡¢Biebrich Scarlet Red¡¢ÔæºìR¡¢ÁÁ²Ø»¨¾«MOO¡¢2-(5-äå-2-ßÁऻùżµª)-5-(¶þÒÒ»ù°±»ù)±½·Ó¡¢6¡¯-¶¡Ñõ»ù-2£¬6-¶þ°±»ù-3£¬3¡¯-żµª¶þßÁड¢ËáÐÔºÚ24¡¢ËáÐÔÀ¶29¡¢ËáÐÔÀ¶92¡¢ËáÐÔÀ¶113¡¢ËáÐÔÀ¶120¡¢ËáÐÔ³È8¡¢ËáÐÔ³È51¡¢ËáÐÔ³È63¡¢ËáÐÔ³È74¡¢ËáÐÔºì1¡¢ËáÐÔºì4¡¢ËáÐÔºì8¡¢ËáÐÔºì37¡¢ËáÐÔºì97¡¢ËáÐÔºì114¡¢ËáÐÔºì151¡¢ËáÐÔºì183¡¢ËáÐÔ×Ï7¡¢ËáÐÔ»Æ17¡¢ËáÐÔ»Æ25¡¢ËáÐÔ»Æ29¡¢ËáÐÔ»Æ34¡¢ËáÐÔ»Æ42¡¢ËáÐÔ»Æ76¡¢ËáÐÔ»Æ99¡¢ÜçËØ»ÆGG¡¢Allura Red AC¡¢ÜȲ˺졢Calcion¡¢Ö¥¼Ó¸çÌìÀ¶6B¡¢¸õ±äËØ2B¡¢¸õ±äËØ2R¡¢¼îÐԾճȡ¢¸Õ¹ûºì¡¢Ö±½ÓÀ¶71¡¢Ö±½Óºì23¡¢Ö±½Óºì75¡¢Ö±½Óºì80¡¢Ö±½Óºì81¡¢Ö±½Ó×Ï51¡¢Ö±½Ó»Æ50¡¢Ö±½Ó»Æ62¡¢·ÖÉ¢ºì1¡¢·ÖÉ¢ºì19¡¢·ÖÉ¢»Æ3¡¢Ñòë¸õÀ¶ºÚB¡¢Ñòë¸õºÚT¡¢°£ÎÄ˹À¶¡¢Ö¬ÈÜÐÔרRR¡¢¼ä°·»Æ¡¢ÝÁ·ÓÀ¶ºÚ¡¢Ïõົơ¢µªºì¡¢Ïõ»ùí¿Å¼µªIII¡¢ÈܼÁºì26ºÍÓͺìO¡£È¾ÁϵÄÒ»¸öÀý×ÓÊǼÈÊÇ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐÖØµª»ùµÄȾÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£
ȾÁϵÄÒ»¸öÀý×ÓÊǺ¬ÓмÈÊǾßÓÐÖØµª»ùµÄ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐôÇ»ù¡¢ÑÇÁòËá»ù»ò²®ÖÁÊå°±»ùµÄȾÁϵÄÖØµªÈ¾ÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£»¹Äܹ»Ê¹È¾ÁϾßÓÐÎȶ¨ÐÔ£¬ÒÔ¸üÎȶ¨µØ¼ì²â³ôÑõ¡£
ÔÚµÚÆß¸öʵʩ·½°¸ÖУ¬ÖƱ¸È¾ÁÏÈÜÒº101ʱ¼ÓÈëµÄËáÊÇÒÒËá¡£¿ÉÒÔʹÓÃÑÎËá¡¢ÁòËáºÍÁ×ËáÖеÄÈκÎÒ»ÖÖËá¡£
ÔÚµÚÆß¸öʵʩ·½°¸ÖУ¬ÖƱ¸È¾ÁÏÈÜÒº101ʱ¼ÓÈëµÄÎüʪ»¯ºÏÎïÊǸÊÓÍ¡£Ò²¿ÉÒÔʹÓÃÒÒ¶þ´¼¡£
×÷Ϊ½«È¾Áϵ¼Èë¶à¿×²ÄÁϵĿ×ÖеÄÒ»ÖÖ·½·¨£¬ÓÃȾÁÏÈÜÒº½«È¾ÁϽþ×Õµ½¶à¿×²ÄÁÏÖУ¬È¾Áϵ¼Èë¿×Öкó¸ÉÔï¡£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏ¿ÉÒÔͨ¹ýÆøÏà³Á»ýµ¼Èë¿×ÖС£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏºÍÆäËü»¯ºÏÎï»ìºÏ£¬È»ºóÔÚÓÃÈܽºÄý½º·¨ÖÆ×÷¶à¿×²ÄÁÏʱ½«Æäµ¼Èë¿×ÖС£
¸ù¾ÝµÚÆß¸öʵʩ·½°¸£¬ÓÃÔÚ¶à¿×²ÄÁϵĿ×Öк¬ÓÐȾÁÏµÄÆøÃôÔª¼þ¿ÉÒÔÔö¼Ó´ý¼ì²âµÄ³ôÑõÆøÌåµÄÎü¸½Ãæ»ý¡£Ó봫ͳ·½·¨Ïà±È£¬ÆäÁéÃô¶ÈºÍÀÛ¼ÆÄÜÁ¦¾ùÓÐÌá¸ß£¬´Ó¶ø¿ÉÒÔʵÏÖÀÛ¼ÆÓ¦Óá£
ÔÚµÚÆß¸öʵʩ·½°¸ÖУ¬¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶Ò²ÓÅÑ¡ÊÇ20nm»ò¸üС¡£
µÚ°Ë¸öʵʩ·½°¸ÏÂÃæËµÃ÷±¾·¢Ã÷µÚ°Ë¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þ¡£
ÏÂÃæÃèÊöµÚ°Ë¸öʵʩ·½°¸µÄ³ôÑõÆøÃôÔª¼þµÄÖÆ×÷·½·¨¡£
Èçͼ1AËùʾ£¬½«×÷ΪȾÁÏ(×ÅÉ«¼Á)µÄµåÀ¶ëÙÖ¬ºì¶þÄÆÑΡ¢×÷Ϊ»º³å¼ÁµÄÁ×ËáºÍ¶þË®ºÏÁ×Ëá¶þÇâÄÆÈܽâÔÚË®ÖУ¬ÖƱ¸È¾ÁÏÈÜÒº¡£µåÀ¶ëÙÖ¬ºì¶þÄÆÑεÄŨ¶ÈÊÇ0.4£¥£¬Á×ËáµÄŨ¶ÈÊÇ50mmol£¬¶þË®ºÏÁ×Ëá¶þÇâÄÆµÄŨ¶ÈÊÇ50mmol¡£
Èçͼ1BËùʾ£¬Ê¹Æ½¾ù¿×¾¶Îª4nmµÄ¶à¿×²ÄÁϽþÅÝÔÚȾÁÏÈÜÒºÖС£¶à¿×²ÄÁÏÓëµÚÒ»¸öʵʩ·½°¸ÖÐËùÊöµÄÏàͬ£¬ÊÇÓùº×ÔCorningµÄVycor7930ÖÆ³ÉµÄ¡£¶à¿×²ÄÁÏµÄÆ¬³ß´çΪ8(mm)¡Á8(mm)£¬ºñ¶ÈΪ1(mm)¡£¶à¿×²ÄÁÏÔÚȾÁÏÈÜÒºÖнþÅÝ24Сʱ£¬ÓÃȾÁÏÈÜÒº½þ×Õ¶à¿×²ÄÁϵĿס£È»ºó½«¶à¿×²ÄÁÏ¿ÕÆø¸ÉÔï¡£¶à¿×²ÄÁÏÔÚµªÆøÆøÁ÷ÖиÉÔïÒ»Ì죬´Ó¶øÐγɵڰ˸öʵʩ·½°¸µÄÆøÃôÔª¼þ¡£
ÏÂÃæ²Î¿¼Í¼14˵Ã÷µÚ°Ë¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖб©Â¶Ç°ºóµÄÎüÊÕ¹âÆ×¡£ÔÚͼ14ÖУ¬ÐéÏß±íʾ±©Â¶ÔÚ²âÁ¿Ä¿±ê¿ÕÆøÖÐ֮ǰµÄÎüÊÕ¹âÆ×£¬ÊµÏß±íʾµÚ°Ë¸öʵʩ·½°¸µÄÆøÃôÔª¼þÔÚ³ôÑõŨ¶ÈΪ100ppbµÄ¿ÕÆøÖб©Â¶2СʱºóµÄÎüÊÕ¹âÆ×¡£
Ôڵڰ˸öʵʩ·½°¸ÖУ¬Èçͼ14Ëùʾ£¬ÊµÏßÏÔʾÔÚÔ¼600nm²¨³¤´¦µÄÎü¹âÂʽµµÍ¡£½µµÍֵԼΪ0.05£¬´Ó¶ø¿ÉÒÔ¸ßÁéÃô¶ÈµØ¼ì²âppb¼¶µÄ³ôÑõÆøÌå¡£
ÔÚÉÏÊöÖÆ×÷·½·¨ÖУ¬ÖÆ×÷¶Ô±ÈÆøÃôÔª¼þ£¬Ö»ÊÇûÓÐʹÓûº³å¼Á¡£ÓÃ¶Ô±ÈÆøÃôÔª¼þÑо¿Êª¶È±ä»¯µÄ¸ÉÈÅËù²úÉúµÄÓ°Ïì¡£½á¹û¹Û²ìµ½Êª¶È¶Ô¶Ô±ÈÆøÃôÔª¼þÓиÉÈÅ£¬¶øÔڵڰ˸öʵʩ·½°¸µÄÆøÃôÔª¼þÖм¸ºõ¹Û²ì²»µ½ÈκθÉÈÅ¡£
ÈçÉÏËùÊö£¬Ôڵڰ˸öʵʩ·½°¸ÖƱ¸µÄÆøÃôÔª¼þÖУ¬»º³å¼ÁÓëºÍ³ôÑõÆøÌ巴Ӧʱ¶Ô¿É¼ûÇøµÄÎü¹âÂÊ·¢Éú±ä»¯µÄȾÁϵĻìºÏÎï³Á»ýÔÚ͸Ã÷¶à¿×²ÄÁϵĿ×ÖС£¿ÉÒÔÈÏΪµ±ÆøÃôÔª¼þ±©Â¶ÔÚº¬³ôÑõÆøÌåµÄ´óÆøÖÐʱ£¬Îü¸½ÔÚÆøÃôÔª¼þ¿×ÖеijôÑõÆøÌåʹȾÁϺ¬ÓеĵåÀ¶»·ÖеÄ̼̼˫¼ü¶Ï¿ª£¬È¾ÁÏ·Ö×ӵĵç×Ó״̬·¢Éú±ä»¯£¬´Ó¶ø¸Ä±ä¿É¼ûÇøµÄÎüÊÕ¹âÆ×¡£Òò´Ë£¬µ±ÆøÃôÔª¼þµÄÑÕÉ«·¢Éú±ä»¯ÇÒµÚÒ»ºÍµÚ¶þ͸ÉäÂʲ»Í¬Ê±¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£
¼ÓÈëÓлº³å¼Áʱ£¬¼´Ê¹Êª¶È±ä»¯Ôì³ÉË®·ÖµÄÔö¼Ó£¬ÇâÀë×ÓŨ¶ÈÒ²Äܱ£³Öºã¶¨¡£Òò´Ë¿ÉÒÔ¼õСʪ¶ÈµÄ¸ÉÈÅ¡£
µÚ°Ë¸öʵʩ·½°¸ÒÑÓõåÀ¶ëÙÖ¬ºì¶þÄÆÑÎ×÷ΪȾÁϵÄÀý×Ó¡£È¾ÁϵÄÒ»¸öÀý×ÓÊǺ¬µåÀ¶»·µÄµåÇàÀà×ÅÉ«¼Á(ÈçµåÀ¶»òµåÀ¶ëÙÖ¬ºìÈý¼ØÑÎ)¡£
ȾÁϵÄÀý×ÓÓÐÒ»ºÅ³È¡¢¶þºÅ³È¡¢³ÈG¡¢¼×»ù³È¡¢ÙÂ˹Âóר¡¢¼×»ù»Æ¡¢ËáÐÔ¸õ×ÏK¡¢²Ø»¨³ÈG¡¢¸õ±äËØFB¡¢ÐÂëÙÖ¬¡¢½á¾§Ðɺ졢ÜçËØÀ¶ºÚR¡¢Plasmocorinth B¡¢ËÕµ¤II¡¢ËÕµ¤III¡¢ËÕµ¤IV¡¢ËÕµ¤ºìB¡¢ËÕµ¤ºì7B¡¢Ííϼ»ÆFCF¡¢¼×±½°·ºì¡¢½ðÁ«³ÈO¡¢¶þ¼×´ú±½°·Àö´ººì2R¡¢Ð¿Ò»ÄÆÑΡ¢±½²¢ºì×Ï4B¡¢Biebrich Scarlet Red¡¢ÔæºìR¡¢ÁÁ²Ø»¨¾«MOO¡¢2-(5-äå-2-ßÁऻùżµª)-5-(¶þÒÒ»ù°±»ù)±½·Ó¡¢6¡¯-¶¡Ñõ»ù-2£¬6-¶þ°±»ù-3£¬3¡¯-żµª¶þßÁड¢ËáÐÔºÚ24¡¢ËáÐÔÀ¶29¡¢ËáÐÔÀ¶92¡¢ËáÐÔÀ¶113¡¢ËáÐÔÀ¶120¡¢ËáÐÔ³È8¡¢ËáÐÔ³È51¡¢ËáÐÔ³È63¡¢ËáÐÔ³È74¡¢ËáÐÔºì1¡¢ËáÐÔºì4¡¢ËáÐÔºì8¡¢ËáÐÔºì37¡¢ËáÐÔºì97¡¢ËáÐÔºì114¡¢ËáÐÔºì151¡¢ËáÐÔºì183¡¢ËáÐÔ×Ï7¡¢ËáÐÔ»Æ17¡¢ËáÐÔ»Æ25¡¢ËáÐÔ»Æ29¡¢ËáÐÔ»Æ34¡¢ËáÐÔ»Æ42¡¢ËáÐÔ»Æ76¡¢ËáÐÔ»Æ99¡¢ÜçËØ»ÆGG¡¢Allura Red AC¡¢ÜȲ˺졢Calcion¡¢Ö¥¼Ó¸çÌìÀ¶6B¡¢¸õ±äËØ2B¡¢¸õ±äËØ2R¡¢¼îÐԾճȡ¢¸Õ¹ûºì¡¢Ö±½ÓÀ¶71¡¢Ö±½Óºì23¡¢Ö±½Óºì75¡¢Ö±½Óºì80¡¢Ö±½Óºì81¡¢Ö±½Ó×Ï51¡¢Ö±½Ó»Æ50¡¢Ö±½Ó»Æ62¡¢·ÖÉ¢ºì1¡¢·ÖÉ¢ºì19¡¢·ÖÉ¢»Æ3¡¢Ñòë¸õÀ¶ºÚB¡¢Ñòë¸õºÚT¡¢°£ÎÄ˹À¶¡¢Ö¬ÈÜÐÔרRR¡¢¼ä°·»Æ¡¢ÝÁ·ÓÀ¶ºÚ¡¢Ïõົơ¢µªºì¡¢Ïõ»ùí¿Å¼µªIII¡¢ÈܼÁºì26ºÍÓͺìO¡£È¾ÁϵÄÒ»¸öÀý×ÓÊǼÈÊÇ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐÖØµª»ùµÄȾÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£
ȾÁϵÄÒ»¸öÀý×ÓÊǺ¬ÓмÈÊǾßÓÐÖØµª»ùµÄ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐôÇ»ù¡¢ÑÇÁòËá»ù»ò²®ÖÁÊå°±»ùµÄȾÁϵÄÖØµªÈ¾ÁÏ¡£Ê¹ÓÃÕâЩȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£»¹Äܹ»Ê¹È¾ÁϾßÓÐÎȶ¨ÐÔ£¬ÒÔ¸üÎȶ¨µØ¼ì²â³ôÑõ¡£
×÷Ϊ½«È¾Áϵ¼Èë¶à¿×²ÄÁϵĿ×ÖеÄÒ»ÖÖ·½·¨£¬ÓÃȾÁÏÈÜÒº½«È¾ÁϽþ×Õµ½¶à¿×²ÄÁÏÖУ¬È¾Áϵ¼Èë¿×Öкó¸ÉÔï¡£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏ¿ÉÒÔͨ¹ýÆøÏà³Á»ýµ¼Èë¿×ÖС£×÷ΪÁíÒ»ÖÖ·½·¨£¬È¾ÁÏºÍÆäËü»¯ºÏÎï»ìºÏ£¬È»ºóÔÚÓÃÈܽºÄý½º·¨ÖÆ×÷¶à¿×²ÄÁÏʱ½«Æäµ¼Èë¿×ÖС£
¸ù¾ÝµÚ°Ë¸öʵʩ·½°¸£¬ÓÃÔÚ¶à¿×²ÄÁϵĿ×Öк¬ÓÐȾÁÏµÄÆøÃôÔª¼þ¿ÉÒÔÔö¼Ó´ý¼ì²âµÄ³ôÑõÆøÌåµÄÎü¸½Ãæ»ý¡£Ó봫ͳ·½·¨Ïà±È£¬ÆäÁéÃô¶ÈºÍÀÛ¼ÆÄÜÁ¦¾ùÓÐÌá¸ß£¬´Ó¶ø¿ÉÒÔʵÏÖÀÛ¼ÆÓ¦Óá£
Ôڵڰ˸öʵʩ·½°¸ÖУ¬¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶Ò²ÓÅÑ¡ÊÇ20nm»ò¸üС¡£
µÚÒ»¸öÖÁµÚ°Ë¸öʵʩ·½°¸ÃèÊöÁ˰å×´ÆøÃôÔª¼þ¡£ÆøÃôÔª¼þ²¢²»ÏÞÓÚ´Ë£¬¿ÉÒÔ¼Ó¹¤³ÉÏËάÐÎ×´¡£
ÔÚÉÏÊöʵʩ·½°¸ÖУ¬È¾ÁÏ(×ÅÉ«¼Á)³Á»ýÔÚ¶à¿×²ÄÁϵĿ×ÖС£±¾·¢Ã÷²»ÏÞÓÚ¶à¿×²ÄÁÏ£¬¿ÉÒÔʹÓÃÈκβÄÁÏ£¬Ö»ÒªÄܹ»¼ì²âºÍ³ôÑõ·´Ó¦Ç°ºóµÄȾÁÏ״̬¼´¿É¡£
µÚ¾Å¸öʵʩ·½°¸ÏÂÃæÃèÊö±¾·¢Ã÷µÄµÚ¾Å¸öʵʩ·½°¸¡£
Èçͼ15Ëùʾ£¬µÚ¾Å¸öʵʩ·½°¸µÄ³ôÑõÆøÌå¼ì²â×°ÖÃ(²âÁ¿×°ÖÃ)°üÀ¨·¢ÉäÔ¤¶¨²¨³¤µÄ¹âµÄ·¢¹âµ¥Ôª1001¡¢´«¸Ð·¢¹âµ¥Ôª1001·¢ÉäµÄ¹âµÄÆøÃôÔª¼þ1002¡¢ÓëÆøÃôÔª¼þ1002Á¬½Ó£¬½ÓÊÕͨ¹ýÆøÃôÔª¼þ1002µÄ¹âµÄ¹â¼ì²âµ¥Ôª1003¡¢Óë¹â¼ì²âµ¥Ôª1003Á¬½ÓµÄÐźŴ¦Àíµ¥Ôª1008¡£
ÐźŴ¦Àíµ¥Ôª1008°üÀ¨Óë¹â¼ì²âµ¥Ôª1003Á¬½ÓµÄת»»/·Å´óµ¥Ôª1004¡¢Óëת»»/·Å´óµ¥Ôª1004Á¬½ÓµÄA/Dת»»µ¥Ôª1005¡¢ÓëA/Dת»»µ¥Ôª1005Á¬½ÓµÄÊä³ö¼ì²âµ¥Ôª1006¼°ÓëÊä³ö¼ì²âµ¥Ôª1006Á¬½ÓµÄÔËËãµ¥Ôª1007¡£
ÀýÈ磬ÓÉ·¢ÉäÔ¤¶¨²¨³¤µÄ¹âµÄLED¹¹³ÉµÄ·¢¹âµ¥Ôª1001·¢ÉäµÄ¹âÕÕÉ䯸ÃôÔª¼þ1002¡£¹â¼ì²âµ¥Ôª1003½ÓÊÕͨ¹ýÆøÃôÔª¼þ1002µÄ¹â¡£¹â¼ì²âµ¥Ôª1003½«½ÓÊÕµÄ¹â½øÐйâµçת»»ºóÊä³öÐźŵçÁ÷¡£×ª»»/·Å´óµ¥Ôª1004½«Êä³öÐźŵçÁ÷·Å´ó£¬È»ºó½«µçÁ÷ת»»³Éµçѹ¡£A/Dת»»µ¥Ôª1005½«µçѹÐźÅת»»³ÉÊý×ÖÐźš£Êä³ö¼ì²âµ¥Ôª1006½«Êý×ÖÐźÅ×÷Ϊ¼ì²â½á¹ûÊä³ö¡£ÔËËãµ¥Ôª1007»ùÓÚÊä³ö¼ì²âµ¥Ôª1006µÄÊä³öÐźźÍÊÂÏȵõ½µÄº¬ÓÐȾÁÏ303µÄÆøÃôÔª¼þÔÚȾÁÏÓë³ôÑõÆøÌå304·´Ó¦Ç°µÄ¹âÎüÊÕÐÔÄܼÆËã³ôÑõÆøÌåÁ¿¡£
ÆøÃôÔª¼þ1002ÊÇÈÎÒ»ÉÏÊöµÚÒ»¸öÖÁµÚ°Ë¸öʵʩ·½°¸µÄÆøÃôÔª¼þ¡£·¢¹âµ¥Ôª1001¿ÉÒÔ²ÉÓ÷¢É䲨³¤ÀýÈçΪ470nmµÄÀ¶É«LED¡£
ÀýÈ磬ÓþßÓеÚÒ»¸öʵʩ·½°¸µÄÆøÃôÔª¼þµÄ¼ì²â×°ÖÃ(²âÁ¿×°ÖÃ)ÔÚ¸ÉÔï¿ÕÆøÆø·ÕÖкͳôÑõŨ¶ÈΪ50ppb-500ppbµÄ¿ÕÆøÖмì²â³ôÑõÆøÌå¡£
¿ÉÒÔÈÏΪµ±³ôÑõÆøÌå½øÈëÆøÃôÔª¼þµÄ¿×Öв¢Îü¸½ÔÚÆäÉÏʱ£¬È¾ÁÏÖеÄË«¼üÈçN£½N»òC£½C¶Ï¿ª£¬È¾ÁÏ·Ö×ӵĵç×Ó״̬·¢Éú±ä»¯£¬´Ó¶ø¸Ä±äÆøÃôÔª¼þµÄÑÕÉ«¡£½á¹û¸Ä±äÁ˿ɼûÇøµÄÎüÊÕ¹âÆ×¡£·¢¹âµ¥Ôª1001·¢ÉäµÄ¹â¾¹ýÆøÃôÔª¼þ1002½øÈë¹â½ÓÊÕµ¥Ôª1003£¬µ±¹â½ÓÊÕµ¥Ôª1003Êä³öµÄµçÐźű仯ʱ£¬ÓýøÐÐÐźŴ¦ÀíµÄµç¹¤²âÊÔÒÇÆ÷¿ÉÒÔ¼ì²âÆøÃôÔª¼þ1002µÄÑÕÉ«±ä»¯¡£
È»ºó£¬ÈçÉÏËùÊö£¬¿ÉÒԵõ½²»Í¬ÓÚ³õʼ״̬µÄÊä³öÐźţ¬ÔÚ³õʼ״̬ÖУ¬ÆøÃôÔª¼þ²»±©Â¶ÔÚ³ôÑõÆøÌåÖС£
¸ù¾ÝµÚ¾Å¸öʵʩ·½°¸£¬Ò×ÓÚ½¨¹¹³ôÑõÆøÌå¼ì²â×°ÖÃ(²âÁ¿×°ÖÃ)¡£
ÈçÉÏËùÊö£¬±¾·¢Ã÷µÄ³ôÑõÆøÃôÔª¼þ°üÀ¨¶à¿×²ÄÁϺͳÁ»ýÔÚ¶à¿×²ÄÁϵĿ×ÖÐÇҿɼûÇøµÄ¹âÎüÊÕÐÔÄÜËæÆäÓë³ôÑõÆøÌåµÄ·´Ó¦¶ø±ä»¯µÄȾÁÏ¡£ÀûÓÃÕâÖֽṹ£¬µ±³ôÑõÆøÌå½øÈëÆøÃôÔª¼þµÄ¿×Öв¢Îü¸½ÔÚÆäÉÏʱ£¬È¾ÁϷֽ⣬ʹ³ôÑõÆøÃôÔª¼þÍÊÉ«¡£¼ì²âÑÕÉ«±ä»¯¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£Ó봫ͳ·½·¨Ïà±È£¬Äܹ»¸ü¼òÒס¢¸ü¸ß¾«¶ÈµØ¼ì²â³ôÑõÆøÌå¡£
¼ÈÊÇ·¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐÖØµª»ùµÄȾÁϼ´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£
¼ÈÊǾßÓз¼Ïã×廯ºÏÎï(Èç±½¡¢ÝÁ»òÝì)ÓÖÓÐôÇ»ù¡¢ÑÇÁòËá»ù»ò²®ÖÁÊå°±»ù¼°Öصª»ùµÄȾÁϼ´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£»¹Äܹ»Ê¹È¾ÁϾßÓÐÎȶ¨ÐÔ£¬ÒÔ¸üÎȶ¨µØ¼ì²â³ôÑõ¡£
µ±Èý±½»ù¼×Íé×ÅÉ«¼ÁȾÁÏÓÃ×÷ȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£
µ±º¬Æ·ºìͪÑǰ·µÄȾÁÏÓÃ×÷ȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£
µ±¾ßÓеåÀ¶»·µÄµåÇàÀà×ÅÉ«¼ÁÓÃ×÷ȾÁÏʱ£¬¼´Ê¹´æÔÚÆäËüÆøÌåÒ²Äܹ»Ã÷È·µØ¼ì²âµ½³ôÑõ¡£
ÒòΪÈý±½»ù¼×Íé×ÅÉ«¼ÁȾÁÏ»òÆ·ºìͪÑǰ·È¾ÁϺͼî³Á»ýÔÚ¶à¿×²ÄÁϵĿ×ÖУ¬ËùÒÔÄܹ»Îȶ¨ÆäÎü¹âÂÊ£¬¼´Ê¹ÔÚµªÆøÖÐҲûÓÐÈκα仯¡£
ÒòΪȾÁϺÍËáÐÔÆøÌåÎü¸½¼Á³Á»ýÔÚ¶à¿×²ÄÁϵĿ×ÖУ¬ËùÒÔÄܹ»¼ì²âµ½³ôÑõ£¬ÇÒNO2²»»áÓÐÈκθÉÈÅ¡£×÷ΪËáÐÔÆøÌåÎü¸½¼Á£¬¿ÉÒÔʹÓøÊÓͺÍÈýÒÒ´¼°·ÖеÄÒ»ÖÖ¡£¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶É趨ΪȾÁÏÄܹ»½øÈë¿×ÖеÄ20nm»ò¸üС¡£ÔÚUV¿É¼û²¨³¤Çø(²¨³¤Îª200nm-2000nm)²âÁ¿ÎüÊÕ¹âÆ×ʱ£¬Äܹ»Í¸Éä´óÁ¿¿É¼û¹âÇø(350nm-800nm)µÄ¹â¡£
ÖØµªÈ¾ÁÏ»òµåÇàÀàȾÁϺÍËá³Á»ýÔÚ¶à¿×²ÄÁϵĿ×ÖС£ÀûÓÃÕâÖֽṹ£¬µ±³ôÑõÆøÌå½øÈëÆøÃôÔª¼þµÄ¿×Öв¢Îü¸½ÔÚÆäÉÏʱ£¬È¾ÁϷֽ⣬ʹ³ôÑõÆøÃôÔª¼þÍÊÉ«¡£¼ì²âÑÕÉ«±ä»¯¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£Ó봫ͳ·½·¨Ïà±È£¬Äܹ»¸ü¼òÒס¢¸ü¸ß¾«¶ÈµØ¼ì²â³ôÑõÆøÌå¡£
ÔÚ³ôÑõÆøÃôÔª¼þÖУ¬ËáÑ¡×ÔÑÎËá¡¢ÒÒËá¡¢ÁòËáºÍÁ×ËáÖеÄÒ»ÖÖ¡£¶à¿×²ÄÁÏÖпÉÒÔ»ìÈëÐí¶àȾÁÏ×é·Ö¡£
ÔÚ³ôÑõÆøÃôÔª¼þÖУ¬¸ÊÓͺÍȾÁϼ°ËáÒ»Æð³Á»ýÔÚ¶à¿×²ÄÁϵĿ×ÖУ¬´Ó¶øÄܹ»·ÀÖ¹NO2µÄ¸ÉÈÅ¡£
ÔÚ³ôÑõÆøÃôÔª¼þÖУ¬¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶É趨ΪСÓÚ20nm£¬Ê¹µÃȾÁÏÄܹ»½øÈë¿×ÖС£ÔÚUV¿É¼û²¨³¤Çø(²¨³¤Îª200nm-2000nm)²âÁ¿ÎüÊÕ¹âÆ×ʱ£¬Äܹ»Í¸Éä´óÁ¿¿É¼û¹âÇø(350nm-800nm)µÄ¹â¡£
ÖØµªÈ¾ÁÏ»òµåÇàÀàȾÁÏ¡¢ËáºÍÎüʪ»¯ºÏÎï³Á»ýÔÚ¶à¿×²ÄÁϵĿ×ÖС£ÀûÓÃÕâÖֽṹ£¬µ±³ôÑõÆøÌå½øÈëÆøÃôÔª¼þµÄ¿×Öв¢Îü¸½ÔÚÆäÉÏʱ£¬È¾ÁϷֽ⣬ʹ³ôÑõÆøÃôÔª¼þÍÊÉ«¡£¼ì²âÑÕÉ«±ä»¯¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£Ó봫ͳ·½·¨Ïà±È£¬Äܹ»¸ü¼òÒס¢¸ü¸ß¾«¶ÈµØ¼ì²â³ôÑõÆøÌå¡£
ÔÚ³ôÑõÆøÃôÔª¼þÖУ¬ËáÑ¡×ÔÑÎËá¡¢ÒÒËá¡¢ÁòËáºÍÁ×ËáÖеÄÒ»ÖÖ¡£¶à¿×²ÄÁÏÖпÉÒÔ»ìÈëÐí¶àȾÁÏ×é·Ö¡£
ÔÚ³ôÑõÆøÃôÔª¼þÖУ¬Îüʪ»¯ºÏÎïµÄÀý×ÓÊÇÒÒ´¼ºÍÒÒ¶þ´¼¡£¶à¿×²ÄÁÏÖб£³ÖÓдóÁ¿Ë®£¬ËùÒÔÄܹ»½µµÍʪ¶ÈµÄÓ°Ïì¡£
ÔÚ³ôÑõÆøÃôÔª¼þÖУ¬¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶É趨ΪСÓÚ20nm£¬Ê¹µÃȾÁÏÄܹ»½øÈë¿×ÖС£ÔÚUV¿É¼û²¨³¤Çø(²¨³¤Îª200nm-2000nm)²âÁ¿ÎüÊÕ¹âÆ×ʱ£¬Äܹ»Í¸Éä´óÁ¿¿É¼û¹âÇø(350nm-800nm)µÄ¹â¡£
ÖØµªÈ¾ÁÏ»òµåÇàÀàȾÁϺͻº³å¼Á³Á»ýÔÚ¶à¿×²ÄÁϵĿ×ÖС£ÀûÓÃÕâÖֽṹ£¬µ±³ôÑõÆøÌå½øÈëÆøÃôÔª¼þµÄ¿×Öв¢Îü¸½ÔÚÆäÉÏʱ£¬È¾ÁϷֽ⣬ʹ³ôÑõÆøÃôÔª¼þÍÊÉ«¡£¼ì²âÑÕÉ«±ä»¯¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£Ó봫ͳ·½·¨Ïà±È£¬Äܹ»¸ü¼òÒס¢¸ü¸ß¾«¶ÈµØ¼ì²â³ôÑõÆøÌå¡£
ÒòΪ³ôÑõÆøÃôÔª¼þÖе¼ÈëÁË»º³å¼Á£¬ËùÒÔÄܹ»±£³ÖÇâÀë×ÓÔÚ¶à¿×²ÄÁÏÖеÄŨ¶È£¬¼¸ºõ²»ÊÜʪ¶ÈµÄÓ°Ïì¡£
ÔÚ³ôÑõÆøÃôÔª¼þÖУ¬¶à¿×²ÄÁÏµÄÆ½¾ù¿×¾¶É趨ΪСÓÚ20nm£¬Ê¹µÃȾÁÏÄܹ»½øÈë¿×ÖС£ÔÚUV¿É¼û²¨³¤Çø(²¨³¤Îª200nm-2000nm)²âÁ¿ÎüÊÕ¹âÆ×ʱ£¬Äܹ»Í¸Éä´óÁ¿¿É¼û¹âÇø(350nm-800nm)µÄ¹â¡£
ÓÃÔÚ¶à¿×²ÄÁϵĿ×Öк¬ÓÐȾÁÏµÄÆøÃôÔª¼þ¿ÉÒÔÔö¼Ó´ý¼ì²âµÄ³ôÑõÆøÌåµÄÎü¸½Ãæ»ý¡£Ó봫ͳ·½·¨Ïà±È£¬ÆäÁéÃô¶ÈºÍÀÛ¼ÆÄÜÁ¦¾ùÓÐÌá¸ß£¬´Ó¶ø¿ÉÒÔʵÏÖÀÛ¼ÆÓ¦Óá£
±¾·¢Ã÷µÄ³ôÑõÆøÌå¼ì²â×°ÖÃ(²âÁ¿×°ÖÃ)°üÀ¨·¢¹âµ¥Ôª¡¢¹â¼ì²âµ¥Ôª¡¢ÆøÃôÔª¼þºÍÐźŴ¦Àíµ¥Ôª¡£·¢¹âµ¥Ôª·¢ÉäÔ¤¶¨²¨³¤µÄ¹â¡£ÆøÃôÔª¼þ²åÈëÔÚ·¢¹âµ¥ÔªºÍ¹â¼ì²âµ¥ÔªÖ®¼ä£¬ÆøÃôÔª¼þ°üÀ¨¶à¿×²ÄÁϺͳÁ»ýÔÚ¶à¿×²ÄÁϵĿ×ÖÐÇҿɼûÇøµÄ¹âÎüÊÕÐÔÄÜËæÆäÓë³ôÑõÆøÌåµÄ·´Ó¦¶ø±ä»¯µÄȾÁÏ¡£¹â¼ì²âµ¥Ôª°üÀ¨²¼ÖÃÎªÃæ¶Ô·¢¹âµ¥ÔªµÄ¹â½ÓÊÕ±íÃæ¡£¹â¼ì²âµ¥ÔªÀûÓÃÆøÃôÔª¼þ½ÓÊÕ·¢¹âµ¥Ôª·¢ÉäµÄ¹â£¬²¢Êä³ö¶ÔÓ¦ÓÚ¹â½ÓÊÕ±íÃæ½ÓÊյĹâͨÁ¿µÄÐźš£ÐźŴ¦Àíµ¥Ôª»ùÓÚ¹â¼ì²âµ¥ÔªµÄÊä³öÐźźÍÊÂÏȵõ½µÄº¬ÓÐȾÁÏµÄÆøÃôÔª¼þÔÚȾÁÏÓë³ôÑõÆøÌ巴ӦǰµÄ¹âÎüÊÕÐÔÄܼÆËã³ôÑõÆøÌåÁ¿¡£
ÀûÓÃÕâÖֽṹ£¬µ±³ôÑõÆøÌå½øÈëÆøÃôÔª¼þµÄ¿×Öв¢Îü¸½ÔÚÆäÉÏʱ£¬È¾ÁϷֽ⣬ʹ³ôÑõÆøÃôÔª¼þÍÊÉ«¡£·¢¹âµ¥Ôª·¢ÉäµÄ¹â¾¹ýÆøÃôÔª¼þ½øÈë¹â¼ì²âµ¥Ôª£¬µ±¹â¼ì²âµ¥ÔªÊä³öµÄµçÐźű仯ʱ£¬Óõ繤²âÊÔÒÇÆ÷¿ÉÒÔ¼ì²âÆøÃôÔª¼þµÄÑÕÉ«±ä»¯¡£
³ôÑõÆøÌå¼ì²â×°ÖÃ(²âÁ¿×°ÖÃ)¿ÉÒÔ²¼ÖÃÔÚ¼ì²âÄ¿±ê´óÆøÖУ¬¸ß¾«¶ÈµØ¼ì²â³ôÑõÆøÌå¡£Ó봫ͳ·½·¨Ïà±È£¬Äܹ»¸ü¼òÒס¢¸ü¸ß¾«¶ÈµØ¼ì²â³ôÑõÆøÌå¡£
ÀýÈ磬·¢¹âµ¥ÔªÓÉ·¢¹â¶þ¼«¹Ü¹¹³É£¬¹â¼ì²âµ¥ÔªÓɹâµç¾§Ìå¹Ü¹¹³É¡£¼ì²â×°Öû¹°üÀ¨Îª·¢¹â¶þ¼«¹ÜºÍ¹âµç¾§Ìå¹Ü¹©µçµÄµç³Ø×顢ʹµç³Ø×éÏò·¢¹â¶þ¼«¹ÜºÍ¹âµç¾§Ìå¹Ü¹©µç»òÍ£Ö¹¹©µçµÄ¿ª¹Ø¡¢Á¬½ÓÔÚ¹âµç¾§Ìå¹ÜºÍµç³Ø×éÖ®¼äµÄ×÷Ϊµç¹¤²âÊÔÒÇÆ÷µÄµçѹ±í¡£¼ì²â×°Öû¹°üÀ¨¾ßÓÐÁ¬½Ó·¢¹â¶þ¼«¹Ü¡¢¹âµç¾§Ìå¹Ü¡¢µç³Ø×é¡¢¿ª¹ØºÍµçѹ±íµÄ¶Ë×ÓµÄÖÕ¶Ë´®(terminalstrip)ºÍÆäÉϲ¼ÖÃÓз¢¹â¶þ¼«¹Ü¡¢¹âµç¾§Ìå¹Ü¡¢µç³Ø×é¡¢¿ª¹Ø¡¢µçѹ±íºÍÖÕ¶Ë´®µÄÃæ°å¡£
Òò´Ë£¬¿ÉÒÔÔÚºÜСµÄÃæ»ýÄÚ¹¹³É¸ß¾«¶È³ôÑõÆøÌå¼ì²â×°ÖÃ(²âÁ¿×°ÖÃ)¡£¿ÉÒÔÓÃÉ̹ºµç³Ø×é×÷ΪµçÔ´£¬´Ó¶ø¿ÉÒÔ¸ü¼òÒ׵ؼì²â³ôÑõÆøÌå¡£
±¾·¢Ã÷µÄ³ôÑõÆøÌå¼ì²â·½·¨(²âÁ¿·½·¨)°üÀ¨ÏÂÊö²½ÖèÖÆ±¸ÆøÃôÔª¼þ£¬ÔÚÆøÃôÔª¼þÖУ¬¿É¼ûÇøµÄ¹âÎüÊÕÐÔÄÜËæÆäÓë³ôÑõÆøÌåµÄ·´Ó¦¶ø±ä»¯µÄȾÁÏ(×ÅÉ«¼Á)³Á»ýÔÚ¶à¿×²ÄÁϵĿ×ÖУ»Ê¹ÆøÃôÔª¼þÔÚ¼ì²â»·¾³Öб©Â¶Ô¤¶¨Ê±¼ä£»»ùÓÚÆøÃôÔª¼þÔÚ¼ì²â»·¾³Öб©Â¶Ç°ºÍ±©Â¶Ô¤¶¨Ê±¼äºóȾÁϵı仯²âÁ¿Ä¿±êÆøÌåÖеijôÑõÆøÌåÁ¿¡£¸ü¾ßÌåµØËµ£¬³ôÑõÆøÌå¼ì²â·½·¨(²âÁ¿·½·¨)°üÀ¨µÚÒ»²½£¬²âÁ¿±¾·¢Ã÷µÄÆøÃôÔª¼þµÄ͸¹âÂÊ£¬µÃµ½µÚÒ»¸ö͸¹âÂÊ£»µÚ¶þ²½£¬Ê¹ÆøÃôÔª¼þÔÚ¼ì²âÄ¿±êÆøÌåÖб©Â¶Ô¤¶¨Ê±¼ä£»µÚÈý²½£¬²âÁ¿ÆøÃôÔª¼þµÄ͸¹âÂÊ£¬µÃµ½µÚ¶þ¸ö͸¹âÂÊ£»µÚËIJ½£¬ÓõÚÒ»¸ö͸¹âÂʺ͵ڶþ¸ö͸¹âÂʵIJîÖµ¼ì²âÄ¿±êÆøÌåÖеijôÑõ¡£
ÀûÓÃÕâЩ²½Ö裬µ±ÆøÃôÔª¼þ±©Â¶ÔÚº¬³ôÑõÆøÌåµÄ´óÆøÖÐʱ£¬Îü¸½ÔÚÆøÃôÔª¼þ¿×ÖеÄȾÁÏ·Ö½â¡£ÆøÃôÔª¼þÑÕÉ«µÄ±ä»¯µ¼ÖµÚÒ»¸ö͸¹âÂʺ͵ڶþ¸ö͸¹âÂʵIJî±ð¡£Òò´Ë¿ÉÒÔ¼ì²â³ôÑõÆøÌå¡£ÆøÃôÔª¼þ±©Â¶ÔÚ¼ì²âÄ¿±ê´óÆøÖкóÖ»¹Û²ìµ½ÆøÃôÔª¼þÑÕÉ«µÄ±ä»¯¡£Ó봫ͳ·½·¨Ïà±È£¬Äܹ»¸ü¼òÒס¢¸ü¸ß¾«¶ÈµØ¼ì²â³ôÑõÆøÌå¡£
ȨÀûÒªÇó
1.Ò»ÖÖ³ôÑõÆøÌå²âÁ¿·½·¨£¬ÌØÕ÷ÔÚÓÚÆä°üÀ¨ÏÂÊö²½ÖèÖÆ±¸ÆøÃôÔª¼þ(302)£¬ÔÚÆøÃôÔª¼þ(302)ÖУ¬¿É¼ûÇøµÄ¹âÎüÊÕÐÔÄÜËæÆäÓë³ôÑõÆøÌå(304)µÄ·´Ó¦¶ø±ä»¯µÄȾÁÏ(303)³Á»ýÔÚ¶à¿×²ÄÁÏ(305)µÄ¿×ÖУ»Ê¹ÆøÃôÔª¼þ(302)ÔÚ¼ì²â»·¾³Öб©Â¶Ô¤¶¨Ê±¼ä£»ºÍ»ùÓÚÆøÃôÔª¼þ(302)ÔÚ¼ì²â»·¾³Öб©Â¶Ç°ºÍ±©Â¶Ô¤¶¨Ê±¼äºóȾÁÏ(303)µÄ±ä»¯²âÁ¿²âÁ¿Ä¿±êÆøÌåÖеijôÑõÆøÌåÁ¿¡£
2.¸ù¾ÝȨÀûÒªÇó1µÄ·½·¨£¬ÆäÖУ¬²âÁ¿³ôÑõÆøÌåÁ¿µÄ²½Öè°üÀ¨²âÁ¿Í¸¹âÂʱ仯µÄ²½Öè¡£
3.¸ù¾ÝȨÀûÒªÇó2µÄ·½·¨£¬ÆäÖУ¬²âÁ¿³ôÑõÆøÌåÁ¿µÄ²½Öè°üÀ¨ÏÂÊö²½Öè²âÁ¿ÆøÃôÔª¼þµÄ͸¹âÂÊ£¬µÃµ½µÚÒ»¸ö͸¹âÂÊ£»ºÍ»ùÓÚµÚÒ»¸ö͸¹âÂʺÍÊÂÏȲâÁ¿µÄÆøÃôÔª¼þ(302)ÔÚ¼ì²â»·¾³Öб©Â¶Ô¤¶¨Ê±¼äÒÔǰµÄµÚ¶þ¸ö͸¹âÂʲâÁ¿²âÁ¿Ä¿±êÆøÌåÖеijôÑõÆøÌåÁ¿¡£
4.¸ù¾ÝȨÀûÒªÇó1µÄ·½·¨£¬ÆäÖУ¬¶à¿×²ÄÁÏ(305)ÖеÄÖÁÉÙһЩ¿×(301)Óë¶à¿×²ÄÁϱíÃæÉϵĿ׿ÁªÔÚÒ»Æð¡£
5.¸ù¾ÝȨÀûÒªÇó1µÄ·½·¨£¬ÆäÖУ¬¶à¿×²ÄÁÏ(305)ÖеĿ×(301)µÄ¿×¾¶Ôڿɼû¹âÇøÄܹ»µÃµ½Ô¤¶¨µÄ͸ÉäÂÊ¡£
6.¸ù¾ÝȨÀûÒªÇó5µÄ·½·¨£¬ÆäÖУ¬¿×¾¶²»´óÓÚ20nm£¬Ê¹µÃȾÁÏ(303)Äܹ»½øÈë¿×ÖС£
7.¸ù¾ÝȨÀûÒªÇó1µÄ·½·¨£¬ÆäÖУ¬È¾ÁÏ(303)°üÀ¨¾ßÓÐÖØµª»ùµÄ·¼Ïã×廯ºÏÎï¡£
8.¸ù¾ÝȨÀûÒªÇó7µÄ·½·¨£¬ÆäÖУ¬·¼Ïã×廯ºÏÎï°üÀ¨Ñ¡×Ô±½¡¢ÝÁºÍÝìµÄÒ»ÖÖ²ÄÁÏ¡£
9.¸ù¾ÝȨÀûÒªÇó7µÄ·½·¨£¬ÆäÖУ¬È¾ÁÏ(303)°üÀ¨¾ßÓÐôÇ»ù¡¢ÑÇÁòËá»ùºÍ²®ÖÁÊå°±»ùÖÐÈÎÒâÒ»ÖÖ»ùÍŵϝºÏÎï¡£
10.¸ù¾ÝȨÀûÒªÇó1µÄ·½·¨£¬ÆäÖУ¬È¾ÁÏ(303)°üÀ¨Èý±½»ù¼×ÍéȾɫ¼Á¡£
11.¸ù¾ÝȨÀûÒªÇó1µÄ·½·¨£¬ÆäÖУ¬È¾ÁÏ(303)º¬ÓÐÆ·ºìͪÑǰ·¡£
12.¸ù¾ÝȨÀûÒªÇó1µÄ·½·¨£¬ÆäÖУ¬È¾ÁÏ(303)º¬ÓеåÀ¶¡£
13.¸ù¾ÝÈÎһȨÀûÒªÇó10ºÍ11µÄ·½·¨£¬ÆäÖУ¬³ýȾÁÏ(303)Íâ£¬ÆøÃôÔª¼þ(302)»¹°üÀ¨¼îÐÔ²ÄÁÏ¡£
14.¸ù¾ÝȨÀûÒªÇó1µÄ·½·¨£¬ÆäÖУ¬³ýȾÁÏ(303)Íâ£¬ÆøÃôÔª¼þ(302)»¹°üÀ¨ËáÐÔÆøÌåÎü¸½¼Á¡£
15.¸ù¾ÝȨÀûÒªÇó14µÄ·½·¨£¬ÆäÖУ¬ËáÐÔÆøÌåÎü¸½¼Á°üÀ¨Ñ¡×Ô¸ÊÓͺÍÈýÒÒ´¼°·µÄÒ»ÖÖ²ÄÁÏ¡£
16.¸ù¾ÝÈÎһȨÀûÒªÇó7ºÍ12µÄ·½·¨£¬ÆäÖУ¬³ýȾÁÏ(303)Íâ£¬ÆøÃôÔª¼þ(302)»¹°üÀ¨Ëá¡£
17.¸ù¾ÝȨÀûÒªÇó16µÄ·½·¨£¬ÆäÖУ¬Ëá°üÀ¨Ñ¡×ÔÑÎËá¡¢ÒÒËá¡¢ÁòËáºÍÁ×ËáµÄÒ»ÖÖËá¡£
18.¸ù¾ÝȨÀûÒªÇó16µÄ·½·¨£¬ÆäÖУ¬³ýȾÁÏ(303)ºÍËáÍâ£¬ÆøÃôÔª¼þ(302)»¹°üÀ¨Îüʪ»¯ºÏÎï¡£
19.¸ù¾ÝȨÀûÒªÇó18µÄ·½·¨£¬ÆäÖУ¬Îüʪ»¯ºÏÎï°üÀ¨Ñ¡×Ô¸ÊÓͺÍÒÒ¶þ´¼µÄÒ»ÖÖ²ÄÁÏ¡£
20.¸ù¾ÝÈÎһȨÀûÒªÇó7ºÍ12µÄ·½·¨£¬ÆäÖУ¬³ýȾÁÏ(303)Íâ£¬ÆøÃôÔª¼þ(302)»¹°üÀ¨»º³å¼Á¡£
21.Ò»ÖÖ³ôÑõÆøÃôÔª¼þ£¬ÌØÕ÷ÔÚÓÚÆä°üÀ¨¶à¿×²ÄÁÏ(305)£»ºÍ³Á»ýÔÚËùÊö¶à¿×²ÄÁÏ(305)µÄ¿×ÖÐÇҿɼûÇøµÄ¹âÎüÊÕÐÔÄÜËæÆäÓë³ôÑõÆøÌå(304)µÄ·´Ó¦¶ø±ä»¯µÄȾÁÏ(303)¡£
22.¸ù¾ÝȨÀûÒªÇó21µÄÔª¼þ£¬ÆäÖУ¬ËùÊö¶à¿×²ÄÁÏ(305)ÖеÄÖÁÉÙһЩ¿×(301)ÓëËùÊö¶à¿×²ÄÁϱíÃæÉϵĿ׿ÁªÔÚÒ»Æð¡£
23.¸ù¾ÝȨÀûÒªÇó21µÄÔª¼þ£¬ÆäÖУ¬ËùÊö¶à¿×²ÄÁÏ(305)ÖеĿ×(301)µÄ¿×¾¶Ôڿɼû¹âÇøÄܹ»µÃµ½Ô¤¶¨µÄ͸ÉäÂÊ¡£
24.¸ù¾ÝȨÀûÒªÇó23µÄÔª¼þ£¬ÆäÖУ¬¿×¾¶²»´óÓÚ20nm£¬Ê¹µÃȾÁÏ(303)Äܹ»½øÈë¿×ÖС£
25.¸ù¾ÝȨÀûÒªÇó21µÄÔª¼þ£¬ÆäÖУ¬È¾ÁÏ(303)°üÀ¨¾ßÓÐÖØµª»ùµÄ·¼Ïã×廯ºÏÎï¡£
26.¸ù¾ÝȨÀûÒªÇó25µÄÔª¼þ£¬ÆäÖУ¬·¼Ïã×廯ºÏÎï°üÀ¨Ñ¡×Ô±½¡¢ÝÁºÍÝìµÄÒ»ÖÖ²ÄÁÏ¡£
27.¸ù¾ÝȨÀûÒªÇó25µÄÔª¼þ£¬ÆäÖУ¬È¾ÁÏ(303)°üÀ¨¾ßÓÐôÇ»ù¡¢ÑÇÁòËá»ùºÍ²®ÖÁÊå°±»ùÖÐÈÎÒâÒ»ÖÖ»ùÍŵϝºÏÎï¡£
28.¸ù¾ÝȨÀûÒªÇó21µÄÔª¼þ£¬ÆäÖУ¬È¾ÁÏ(303)°üÀ¨Èý±½»ù¼×Íé×ÅÉ«¼Á¡£
29.¸ù¾ÝȨÀûÒªÇó21µÄÔª¼þ£¬ÆäÖУ¬È¾ÁÏ(303)º¬ÓÐÆ·ºìͪÑǰ·¡£
30.¸ù¾ÝȨÀûÒªÇó21µÄÔª¼þ£¬ÆäÖУ¬È¾ÁÏ(303)º¬ÓеåÀ¶¡£
31.¸ù¾ÝÈÎһȨÀûÒªÇó28ºÍ29µÄÔª¼þ£¬ÆäÖУ¬³ýȾÁÏ(303)Í⣬ËùÊöÆøÃôÔª¼þ(302)»¹°üÀ¨¼îÐÔ²ÄÁÏ¡£
32.¸ù¾ÝȨÀûÒªÇó21µÄÔª¼þ£¬ÆäÖУ¬³ýȾÁÏ(303)Í⣬ËùÊöÆøÃôÔª¼þ(302)»¹°üÀ¨ËáÐÔÆøÌåÎü¸½¼Á¡£
33.¸ù¾ÝȨÀûÒªÇó32µÄÔª¼þ£¬ÆäÖУ¬ËáÐÔÆøÌåÎü¸½¼Á°üÀ¨Ñ¡×Ô¸ÊÓͺÍÈýÒÒ´¼°·µÄÒ»ÖÖ²ÄÁÏ¡£
34.¸ù¾ÝÈÎһȨÀûÒªÇó25ºÍ30µÄÔª¼þ£¬ÆäÖУ¬³ýȾÁÏ(303)Í⣬ËùÊöÆøÃôÔª¼þ(302)»¹°üÀ¨Ëá¡£
35.¸ù¾ÝȨÀûÒªÇó34µÄÔª¼þ£¬ÆäÖУ¬Ëá°üÀ¨Ñ¡×ÔÑÎËá¡¢ÒÒËá¡¢ÁòËáºÍÁ×ËáµÄÒ»ÖÖËá¡£
36.¸ù¾ÝȨÀûÒªÇó34µÄÔª¼þ£¬ÆäÖУ¬³ýȾÁÏ(303)ºÍËáÍ⣬ËùÊöÆøÃôÔª¼þ(302)»¹°üÀ¨Îüʪ»¯ºÏÎï¡£
37.¸ù¾ÝȨÀûÒªÇó36µÄÔª¼þ£¬ÆäÖУ¬Îüʪ»¯ºÏÎï°üÀ¨Ñ¡×Ô¸ÊÓͺÍÒÒ¶þ´¼µÄÒ»ÖÖ²ÄÁÏ¡£
38.¸ù¾ÝÈÎһȨÀûÒªÇó25ºÍ30µÄÔª¼þ£¬ÆäÖУ¬³ýȾÁÏ(303)Í⣬ËùÊöÆøÃôÔª¼þ(302)»¹°üÀ¨»º³å¼Á¡£
39.¸ù¾ÝȨÀûÒªÇó38µÄÔª¼þ£¬ÆäÖУ¬»º³å¼Á°üÀ¨Á×ËáºÍ¶þË®ºÏÁ×Ëá¶þÇâÄÆ¡£
40.Ò»ÖÖ³ôÑõÆøÌå²âÁ¿×°Öã¬ÌØÕ÷ÔÚÓÚÆä°üÀ¨·¢¹âµ¥Ôª(1001)£»¹â¼ì²âµ¥Ôª(1003)£»ÆøÃôÔª¼þ(1002)£»ºÍÐźŴ¦Àíµ¥Ôª(1007)£¬ÆäÖУ¬ËùÊö·¢¹âµ¥Ôª(1001)·¢ÉäÔ¤¶¨²¨³¤µÄ¹â£¬ËùÊöÆøÃôÔª¼þ(1002)²åÈëÔÚËùÊö·¢¹âµ¥Ôª(1001)ºÍËùÊö¹â¼ì²âµ¥Ôª(1003)Ö®¼ä£¬ÆøÃôÔª¼þ(1002)°üÀ¨¶à¿×²ÄÁÏ(305)ºÍ³Á»ýÔÚ¶à¿×²ÄÁÏ(305)µÄ¿×ÖÐÇҿɼûÇøµÄ¹âÎüÊÕÐÔÄÜËæÆäÓë³ôÑõÆøÌå(304)µÄ·´Ó¦¶ø±ä»¯µÄȾÁÏ(303)£¬ËùÊö¹â¼ì²âµ¥Ôª(1003)°üÀ¨²¼ÖÃÎªÃæ¶ÔËùÊö·¢¹âµ¥Ôª(1001)µÄ¹â½ÓÊÕ±íÃæ£¬ÀûÓÃÆøÃôÔª¼þ(1002)½ÓÊÕËùÊö·¢¹âµ¥Ôª·¢ÉäµÄ¹â£¬²¢Êä³ö¶ÔÓ¦ÓÚ¹â½ÓÊÕ±íÃæ½ÓÊյĹâͨÁ¿µÄÐźţ¬ºÍËùÊöÐźŴ¦Àíµ¥Ôª(1007)»ùÓÚËùÊö¹â¼ì²âµ¥Ôª(1003)µÄÊä³öÐźźÍÊÂÏȵõ½µÄº¬ÓÐȾÁÏ(303)µÄËùÊöÆøÃôÔª¼þÔÚÓë³ôÑõÆøÌå(304)·´Ó¦Ç°µÄ¹âÎüÊÕÐÔÄܼÆËã³ôÑõÆøÌåÁ¿¡£
41.¸ù¾ÝȨÀûÒªÇó40µÄ×°Öã¬ÆäÖУ¬¶à¿×²ÄÁÏ(305)ÖеÄÖÁÉÙһЩ¿×(301)Óë¶à¿×²ÄÁϱíÃæÉϵĿ׿ÁªÔÚÒ»Æð¡£
42.¸ù¾ÝȨÀûÒªÇó40µÄ×°Öã¬ÆäÖУ¬¶à¿×²ÄÁÏ(305)ÖеĿ×(301)µÄ¿×¾¶Ôڿɼû¹âÇøÄܹ»µÃµ½Ô¤¶¨µÄ͸ÉäÂÊ¡£
43.¸ù¾ÝȨÀûÒªÇó42µÄ×°Öã¬ÆäÖУ¬¿×¾¶²»´óÓÚ20nm£¬Ê¹µÃȾÁÏ(303)Äܹ»½øÈë¿×ÖС£
44.¸ù¾ÝȨÀûÒªÇó40µÄ×°Öã¬ÆäÖУ¬È¾ÁÏ(303)°üÀ¨¾ßÓÐÖØµª»ùµÄ·¼Ïã×廯ºÏÎï¡£
45.¸ù¾ÝȨÀûÒªÇó44µÄÔª¼þ£¬ÆäÖУ¬·¼Ïã×廯ºÏÎï°üÀ¨Ñ¡×Ô±½¡¢ÝÁºÍÝìµÄÒ»ÖÖ²ÄÁÏ¡£
46.¸ù¾ÝȨÀûÒªÇó44µÄ×°Öã¬ÆäÖУ¬È¾ÁÏ(303)°üÀ¨¾ßÓÐôÇ»ù¡¢ÑÇÁòËá»ùºÍ²®ÖÁÊå°±»ùÖÐÈÎÒâÒ»ÖֵϝºÏÎï¡£
47.¸ù¾ÝȨÀûÒªÇó40µÄ×°Öã¬ÆäÖУ¬È¾ÁÏ(303)°üÀ¨Èý±½»ù¼×Íé×ÅÉ«¼Á¡£
48.¸ù¾ÝȨÀûÒªÇó40µÄ×°Öã¬ÆäÖУ¬È¾ÁÏ(303)º¬ÓÐÆ·ºìͪÑǰ·¡£
49.¸ù¾ÝȨÀûÒªÇó40µÄ×°Öã¬ÆäÖУ¬È¾ÁÏ(303)º¬ÓеåÀ¶¡£
50.¸ù¾ÝÈÎһȨÀûÒªÇó47ºÍ48µÄ×°Öã¬ÆäÖУ¬³ýȾÁÏ(303)Í⣬ËùÊöÆøÃôÔª¼þ(1002)»¹°üÀ¨¼îÐÔ²ÄÁÏ¡£
51.¸ù¾ÝȨÀûÒªÇó40µÄ×°Öã¬ÆäÖУ¬³ýȾÁÏ(303)Í⣬ËùÊöÆøÃôÔª¼þ(1002)»¹°üÀ¨ËáÐÔÆøÌåÎü¸½¼Á¡£
52.¸ù¾ÝȨÀûÒªÇó51µÄ×°Öã¬ÆäÖУ¬ËáÐÔÆøÌåÎü¸½¼Á°üÀ¨Ñ¡×Ô¸ÊÓͺÍÈýÒÒ´¼°·µÄÒ»ÖÖ²ÄÁÏ¡£
53.¸ù¾ÝÈÎһȨÀûÒªÇó44ºÍ49µÄ×°Öã¬ÆäÖУ¬³ýȾÁÏ(303)Í⣬ËùÊöÆøÃôÔª¼þ(1002)»¹°üÀ¨Ëá¡£
54.¸ù¾ÝȨÀûÒªÇó53µÄ×°Öã¬ÆäÖУ¬Ëá°üÀ¨Ñ¡×ÔÑÎËá¡¢ÒÒËá¡¢ÁòËáºÍÁ×ËáµÄÒ»ÖÖËá¡£
55.¸ù¾ÝȨÀûÒªÇó53µÄ×°Öã¬ÆäÖУ¬³ýȾÁÏ(303)ºÍËáÍ⣬ËùÊöÆøÃôÔª¼þ(1002)»¹°üÀ¨Îüʪ»¯ºÏÎï¡£
56.¸ù¾ÝȨÀûÒªÇó55µÄ×°Öã¬ÆäÖУ¬Îüʪ»¯ºÏÎï°üÀ¨Ñ¡×Ô¸ÊÓͺÍÒÒ¶þ´¼µÄÒ»ÖÖ²ÄÁÏ¡£
57.¸ù¾ÝÈÎһȨÀûÒªÇó44ºÍ49µÄ×°Öã¬ÆäÖУ¬³ýȾÁÏ(303)Í⣬ËùÊöÆøÃôÔª¼þ(1002)»¹°üÀ¨»º³å¼Á¡£
58.¸ù¾ÝȨÀûÒªÇó57µÄ×°Öã¬ÆäÖУ¬»º³å¼Á°üÀ¨Á×ËáºÍ¶þË®ºÏÁ×Ëá¶þÇâÄÆ¡£
È«ÎÄÕªÒª
ÖÆ±¸Ò»ÖÖÆøÃôÔª¼þ£¬ÆäÖУ¬ÔÚ¶à¿×²ÄÁϵĿ×ÖгÁ»ýÓпɼûÇøµÄ¹âÎüÊÕÐÔÄÜËæÆäÓë³ôÑõÆøÌåµÄ·´Ó¦¶ø±ä»¯µÄȾÁÏ¡£²âÁ¿ÆøÃôÔª¼þÔÚ²âÁ¿»·¾³Öб©Â¶Ô¤¶¨Ê±¼äǰºóȾÁϵı仯¡£»ùÓÚȾÁϵı仯²âÁ¿²âÁ¿Ä¿±ê¿ÕÆøÖеijôÑõÆøÌåÁ¿¡£
Îĵµ±àºÅG01N31/22GK1493865SQ0315539
¹«¿ªÈÕ2004Äê5ÔÂ5ÈÕ ÉêÇëÈÕÆÚ2003Äê8ÔÂ28ÈÕ ÓÅÏÈȨÈÕ2002Äê8ÔÂ28ÈÕ
·¢Ã÷ÕßÍèβÈÝ×Ó, С´¨ÖØÄÐ, ÚæÌïÇçÈý, ÌïÖÐÈÚ, Èý, ÄÐ ÉêÇëÈË:ÈÕ±¾µçÐŵ绰Öêʽ»áÉç