רÀûÃû³Æ£º´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñ·½·¨¡¢¹âѧ×é¼þ¼°³ÉÏñϵͳµÄÖÆ×÷·½·¨
´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñ·½·¨¡¢¹âѧ×é¼þ¼°³ÉÏñϵͳ¼¼ÊõÁìÓò
±¾·¢Ã÷ÊôÓÚÏÔ΢³ÉÏñ¼¼ÊõÁìÓò£¬ÌرðÉæ¼°Ò»ÖÖ´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñ·½·¨¡¢¹âѧ×é¼þ¼°³ÉÏñϵͳ¡£
±³¾°¼¼Êõ£º
ϸ°ûÊÇÉúÎïÌå¼°ÉúÃü»î¶¯µÄ»ù±¾µ¥Ôª,¶Ôϸ°ûµÄÉîÈëÑо¿ÊǽҿªÉúÃü°ÂÃØ£¬¸ÄÔìÉúÃüºÍÕ÷·þ¼²²¡µÄ¹Ø¼ü¡£ÔÚÍêÕûϸ°ûϽøÐзÖ×Ó³ÉÏñ£¬½ø¶ø»ñÈ¡ÑÇϸ°û¾«Ï¸½á¹¹ÉõÖÁ·Ö×ÓͼÆ×£¬²¢ÄÜÔÚ»îÌåϸ°ûÏ»ñÈ¡ÕâЩ½á¹¹±ä»¯¼°·Ö×Ó¶¯Ì¬¹ý³ÌµÄÐÅÏ¢Ò»Ö±ÊÇϸ°ûѧÑо¿µÄÖØÒª·½Ïò¡£Í¬Ê±£¬¶ÔÍêÕûϸ°û½øÐÐÄÉÃ×·Ö±æÈýά½á¹¹ºÍ¹¦ÄܳÉÏñ£¬ÔÚ¸ü¸ßˮƽÉÏÈÏʶÑÇϸ°û½á¹¹Óëϸ°û¹¦Äܱ仯µÄ¹ØÏµºÍ¹æÂÉ£¬ÊÇÉúÃü¿ÆÑ§µÄÆÈÇÐÐèÇó£¬Ò²ÊǶԳÉÏñ¿ÆÑ§µÄÖØ´óÌôÕ½¡£
½üÄêÀ´£¬Ô¶³¡ÄÉÃ×·Ö±æÓ«¹âÏÔ΢³ÉÏñ¼¼ÊõÈ¡µÃÁ˽ϴóµÄ·¢Õ¹¡£Ä¿Ç°×îΪͻ³öµÄ·½·¨ÓÐÁ½ÖÖ£¬Ò»ÖÖÊÇ»ùÓÚËõСÓÐЧ¼¤·¢¹â°ß£¬Í¨¹ýÖ±½Ó¼õСµãÀ©Õ¹º¯ÊýµÄ°ë¸ß¿íÀ´Ìá¸ß·Ö±æÂÊ£¬°üÀ¨STED£¬GSDµÈ£»ÁíÒ»ÖÖÔòÊÇ»ùÓÚµ¥·Ö×Ó¶¨Î»¼¼Êõ£¬°üÀ¨STORM£¬PALMµÈ¡£Ç°ÕßÊÇͨ¹ýÊܼ¤Ì¬»ò»ù̬ºÄ¾¡µÄ·½Ê½£¬Ñ¹ËõÓ«¹âÓÐЧ·¢ÉäÇøÓò£»ºóÕßÔòÊÇÀûÓÃÓ«¹â±ê¼Ç±¾ÉíµÄ¿ª¹ØÐ§Ó¦,ͨ¹ýÏ¡Ê輤·¢¡¢·Öʱ³ÉÏñ¡¢ÖÊÐĶ¨Î»ÒÔ¼°Í¼ÏñºÏ³ÉÀ´ÊµÏÖÄÉÃ×·Ö±æ³ÉÏñ£¬ÒѾʵÏÖ20nm µÄºáÏò¿Õ¼ä·Ö±æÂÊ¡£
È»¶ø£¬ÀûÓõ¥·Ö×Ó¶¨Î»¼¼Êõ¶ÔÖ±¾¶Îª10 ¦Ì mÒÔÉϵÄϸ°û½øÐÐÄÉÃ×·Ö±æÈýά³ÉÏñÈÔÈ»´æÔںܶàÎÊÌâ¡£Ê×ÏÈ£¬µ¥·Ö×Ó¶¨Î»¶ÔÓÚÖáÏò·Ö±æÂʲ¢Ã»ÓÐÌá¸ß£¬³£³£ÐèÒª½áºÏijЩ¸Ä½øÖáÏò·Ö±æÂʵķ½·¨£¬ÈçÖùÃæ¾µÏñÉ¢·¨¡¢Ë«ÂÝÐýµãÀ©É¢º¯Êý·¨(DH-PSF)¡¢Ë«²ãÆ½ÃæÌ½²â·¨¡¢ÐéÄâ¿Õ¼ä³¬·Ö±æÏÔ΢Êõ(VVSRM)µÈ£¬¿ÉʵÏÖºáÏò¿Õ¼ä·Ö±æÂÊ´ï20-30nm×óÓÒ£¬ÖáÏò·Ö±æÂÊ´ï 40-70nmµÄÈýά³ÉÏñ£¬Ä¿Ç°£¬ÕâЩ·½·¨µÄ³ÉÏñÉî¶ÈÖ»ÓÐ2 ¦Ì m¡£ÁíÍ⣬¸ÉÉæ¹âÃô¶¨Î»ÏÔ΢¼¼Êõ (iPALM)¿É½«ÈýάµÄ·Ö±æÂÊÌá¸ßµ½20nmÒÔÄÚ£¬µ«³ÉÏñ·¶Î§½ö±»ÏÞÖÆÔڸDz£Æ¬ÒÔÏÂ500nmµÄÉî¶È·¶Î§ÄÚ£¬Òò´Ë£¬ÕâЩ·½·¨µÄ³ÉÏñÉî¶È¾ù½ÏС¡£
ϸ°ûÄÚ¶¯Ì¬³ÉÏñҪʵÏÖϸ°ûÄÚͬʱ׷×Ù¶à¸ö·Ö×Ó£¬ÕâÒªÇó³ÉÏñÊÖ¶ÎÔÚÈýά¿Õ¼äÒÔÄÉÃ×¶¨Î»¾«¶È¿ìËÙ̽²âÊ®¼¸Î¢Ã×¾°ÉΧÄڵĶà¸öÄ¿±ê·Ö×Ó¡£Ä¿Ç°µÄµ¥·Ö×Ó×·×Ù(SPT) ·½·¨£¬¼È¿ÉÒÔ¶ÔÑùÆ·ÖÐÖ»°üº¬Ä¿±ê·Ö×ÓµÄÇøÓò½øÐоֲ¿Ì½²â£¬ÊµÏÖInm¾«¶ÈµÄÓ«¹â³ÉÏñ (FIONA);Ò²¿ÉÒÔ²ÉÓÃ¿í³¡³ÉÏñµÄ·½·¨£¬ÊµÏÖͬʱ׷×Ù¶à¸ö·Ö×Ó¡£ËäÈ»¿í³¡Ì½²âµÄSPT·½·¨ÒѾ·¢Õ¹ÁËͼÏñ¶ÑÕ»¡¢Àë½¹³ÉÏñ¡¢Óþ۽¹¼¤¹â¹âÊø»·ÈÆÁ£×ÓÔ˶¯¡¢FresnelÁ£×Ó×·×Ù(FPT)£¬ ÒÔ¼°ÖùÃæ¾µÏñÉ¢µÈ¶àÖÖÖáÏò·Ö±æµÄ·½·¨£¬ÒѾ¿ÉÒÔʵÏÖÈýάµÄÄÉÃ×¶¨Î»£¬µ«Ä¿Ç°ÊµÏֵijÉÏñÉî¶È½ö½öΪ3 ¦Ì m×óÓÒ£¬¶øÒ»°ãÍêÕûϸ°ûµÄºñ¶ÈÓÐÊ®¼¸Î¢Ã×£¬Òò´Ë£¬ÏÖÓеķ½·¨ÈÔ²»ÄÜÂú×ãϸ°ûÄÚ¶à·Ö×Ó×·×ٵĴó¾°ÉîÒªÇó¡£·¢Ã÷ÄÚÈÝ
±¾·¢Ã÷µÄÄ¿µÄÔÚÓÚÌṩһÖÖ´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñ·½·¨£¬Ö¼ÔÚ½â¾ö´«Í³·½·¨³ÉÏñÉî¶ÈС£¬ÄÑÒÔÂú×ã·Ö×Ó¶¨Î»µÄ´ó¾°ÉîÒªÇóµÄÎÊÌâ¡£
±¾·¢Ã÷ÊÇÕâÑùʵÏֵģ¬Ò»ÖÖ´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñ·½·¨£¬°üÀ¨ÏÂÊö²½Öè
´´½¨¾ßÓÐË«ÂÝÐýµãÀ©É¢º¯ÊýºÍÀë½¹¹âÕ¤¶à½×³ÉÏñÐÔÖʵĹâѧģ¿é£»Í¨¹ýËùÊö¹âѧģ¿é¶Ô´ý²â·Ö×Ó½øÐгÉÏñ£¬»ñµÃ´ý²â·Ö×ÓµÄË«ÂÝÐýͼÏñ£»Í¨¹ýËùÊöË«ÂÝÐýͼÏñÖÐË«ÂÝÐýÅÔ°êµÄÖеãÔÚ³ÉÏñÃæÉϵÄλÖÃÈ·¶¨´ý²â·Ö×ӵĺáÏòλÖã»Í¨¹ýËùÊöË«ÂÝÐýͼÏñÖÐË«ÂÝÐýÅÔ°êµÄÖÐÐÄÁ¬ÏßµÄÐýת½Ç¶È¼°ËùÊöË«ÂÝÐýÅÔ°êµÄÖеãÔÚ³ÉÏñÃæÉϵÄλÖÃÈ·¶¨´ý²â·Ö×ÓµÄÖáÏòλÖᣱ¾·¢Ã÷µÄÁíһĿµÄÔÚÓÚÌṩһÖÖÓÃÓÚ´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñµÄ¹âѧ×é¼þ£¬°üÀ¨Ñعâ·´«Êä·½ÏòÒÀ´ÎÉèÖõĵÚһ͸¾µ£¬ÓÃÓÚ½«´ý²â·Ö×Ó·¢³öµÄÓ«¹â½øÐÐ×¼Ö±£»¹âѧģ¿é£¬¾ßÓÐË«ÂÝÐýµãÀ©É¢º¯ÊýºÍÀë½¹¹âÕ¤¶à½×³ÉÏñÐÔÖÊ£¬ÓÃÓÚ½«ËùÊöÓ«¹âת»»Îª¾ßÓÐË«ÂÝÐý¼°¶à½×³ÉÏñÐÔÖʵijÉÏñ¹âÊø£»µÚ¶þ͸¾µ£¬ÓÃÓÚ½«ËùÊö³ÉÏñ¹âÊøÊä³öÒÔÓÃÓÚ³ÉÏñ¡£±¾·¢Ã÷µÄÓÖһĿµÄÔÚÓÚÌṩһÖÖ´ó¾°É·Ö±æÓ«¹âÏÔ΢³ÉÏñ̽²âϵͳ£¬°üÀ¨Ñعâ·´«Êä·½ÏòÒÀ´ÎÉèÖõÄ̽²âÎï¾µ£¬ÓÃÓÚ½ÓÊÕº¬Óдý²â·Ö×Ó·¢³öµÄÓ«¹âµÄ¹âÊø£»ÂË¹âÆ¬£¬ÓÃÓÚ¶ÔËùÊö¹âÊø½øÐÐÂ˲¨²¢Êä³öËùÊöÓ«¹â£»Ë«É«¾µ£¬ÓÃÓÚ¶ÔËùÊöÓ«¹â½øÐз´É䣻¹Ü¾µ£¬ÓÃÓÚ½«·´ÉäµÄÓ«¹â¾Û½¹²¢Ïò³ÉÏñ×é¼þÊä³ö£»³ÉÏñ×é¼þ£¬²ÉÓÃÉÏÊöµÄ¹âѧ×é¼þ£¬ÓÃÓÚ½«ËùÊöÓ«¹âת»»Îª¾ßÓÐË«ÂÝÐý¼°¶à½×³ÉÏñÐÔÖʵijÉÏñ¹âÊø£»Ì½²âÆ÷£¬ÓÃÓÚ½ÓÊÕËùÊö³ÉÏñ¹âÊø²¢½øÐÐË«ÂÝÐý¼°¶à½×³ÉÏñ¡£±¾·¢Ã÷´´½¨ÁË×ÛºÏË«ÂÝÐýµãÀ©É¢º¯Êý¼°Àë½¹¹âÕ¤¶à½×³ÉÏñË«ÖØÐ§Ó¦µÄ¹âѧģ¿é£¬¶à½×³ÉÏñµÄ¾°Éî½Ï´ó£¬Ë«ÂÝÐý³ÉÏñµÄ·Ö±æÂʽϸßÇÒ¾ßÓÐÒ»¶¨µÄ¾°Éͨ¹ýÉÏÊö¹âѧģ¿é³ÉÏñʱ£¬Ò»·½ÃæÍ¨¹ý¶à½×³ÉÏñºÍË«ÂÝÐý³ÉÏñ´ó·ù¶ÈÀ©´óÁ˾°ÉÁíÒ»·½ÃæÍ¨¹ýË«ÂÝÐý³ÉÏñÏÔÖøµÄÌá¸ßÁË·Ö±æÂÊ£¬±¾·¢Ã÷µÄ³ÉÏñ¾°Éî¿É´ïÊ®¼¸Î¢Ã×£¬¼È¿ÉÓÃÓÚÍêÕûϸ°ûÄÚÈÎÒâÉî¶ÈÑÇϸ°ûµÄ¶¯Ì¬·¶Î§³ÉÏñ£¬ÓÖ¿É»ñµÃ¶à¸öÔ˶¯·Ö×ӵĶ¯Ì¬¹¦ÄÜͼÏñ£¬¶ÔÓÚÔÚ¸ü¸ßˮƽÉÏÈÏʶÑÇϸ°û½á¹¹Óëϸ°û¹¦Äܱ仯µÄ¹ØÏµºÍ¹æÂɾßÓÐÖØÒªÒâÒå¡£
ͼ1ÊDZ¾·¢Ã÷µÚһʵʩÀýÌṩµÄ´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñ·½·¨µÄÁ÷³Ìͼ£»Í¼2ÊDz»Í¬Éî¶ÈµÄË«ÂÝÐýµãÀ©É¢º¯ÊýºÍ±ê×¼µãÀ©É¢º¯Êý³ÉÏñµÄ¶ÔÕÕͼ£»Í¼3ÊÇË«ÂÝÐýµãÀ©É¢º¯Êý³ÉÏñµÄÇ¿¶ÈÓëÏàλ·Ö²¼£»Í¼4ÊÇË«ÂÝÐýµãÀ©É¢º¯ÊýÔÚ²»Í¬ÖáÏòλÖô¦µÄ³ÉÏñͼÐΣ»Í¼5ÊÇË«ÂÝÐýͼÏñÁ½¸öÅÔ°êÖÐÐÄÁ¬ÏßµÄÐýת½Ç¶ÈÓëZÖáλÖõĹØÏµÇúÏßͼ£»Í¼6ÊÇÀë½¹¹âÕ¤³ÉÏñÔÀíʾÒâͼ£»Í¼7ÊDZ¾·¢Ã÷µÚһʵʩÀýÌṩµÄÏàλƬµÄʾÒâͼ£»Í¼8ÊÇÀûÓÃͼ7ËùʾÏàλƬ½øÐгÉÏñµÄЧ¹ûͼ£»Í¼9ÊDZ¾·¢Ã÷µÚ¶þʵʩÀýÌṩµÄÓÃÓÚ´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñµÄ¹âѧ×é¼þʾÒâͼ10ÊDZ¾·¢Ã÷µÚÈýʵʩÀýÌṩµÄÒ»ÖÖ´ó¾°É·Ö±æÓ«¹âÏÔ΢³ÉÏñ̽²âϵͳʾÒâ ͼ£»Í¼11ÊDZ¾·¢Ã÷µÚÈýʵʩÀýÌṩµÄÁíÒ»ÖÖ´ó¾°É·Ö±æÓ«¹âÏÔ΢³ÉÏñ̽²âϵͳʾ Òâͼ¡£
¾ßÌåʵʩÀý·½Ê½ÎªÁËʹ±¾·¢Ã÷µÄÄ¿µÄ¡¢¼¼Êõ·½°¸¼°Óŵã¸ü¼ÓÇå³þÃ÷°×£¬ÒÔϽáºÏ¸½Í¼¼°ÊµÊ©Àý£¬¶Ô ±¾·¢Ã÷½øÐнøÒ»²½Ïêϸ˵Ã÷¡£Ó¦µ±Àí½â£¬´Ë´¦ËùÃèÊöµÄ¾ßÌåʵʩÀý½ö½öÓÃÒÔ½âÊͱ¾·¢Ã÷£¬²¢ ²»ÓÃÓÚÏÞ¶¨±¾·¢Ã÷¡£ÒÔϽáºÏ¾ßÌåʵʩÀý¶Ô±¾·¢Ã÷µÄ¾ßÌåʵÏÖ½øÐиü¼ÓÏêϸµÄÃèÊöʵʩÀýÒ»:ͼ1ʾ³öÁ˱¾·¢Ã÷µÚһʵʩÀýÌṩµÄ´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñ·½·¨µÄÁ÷³Ìͼ£¬Îª Á˱ãÓÚ˵Ã÷£¬½öʾ³öÁËÓ뱾ʵʩÀýÏà¹ØµÄ²¿·Ö¡£²Î¿¼¸½Í¼1£¬¸Ã·½·¨Ö÷Òª°üÀ¨ÏÂÊö²½ÖèÔÚ²½ÖèS101ÖУ¬´´½¨¾ßÓÐË«ÂÝÐýµãÀ©É¢º¯ÊýºÍÀë½¹¹âÕ¤¶à½×³ÉÏñÐÔÖʵĹâѧģ ¿é£»ÔÚ²½ÖèS102ÖУ¬Í¨¹ý¹âѧģ¿é¶Ô´ý²â·Ö×Ó½øÐгÉÏñ£¬»ñµÃ´ý²â·Ö×ÓµÄË«ÂÝÐýͼ Ïñ£»ÔÚ²½ÖèS103ÖУ¬Í¨¹ýË«ÂÝÐýͼÏñÖÐË«ÂÝÐýÅÔ°êµÄÖеãÔÚ³ÉÏñÃæÉϵÄλÖÃÈ·¶¨´ý ²â·Ö×ӵĺáÏòλÖã»ÔÚ²½ÖèS104ÖУ¬Í¨¹ýË«ÂÝÐýͼÏñÖÐË«ÂÝÐýÅÔ°êµÄÖÐÐÄÁ¬ÏßµÄÐýת½Ç¶È¼°Ë«ÂÝÐý ÅÔ°êµÄÖеãÔÚ³ÉÏñÃæÉϵÄλÖÃÈ·¶¨´ý²â·Ö×ÓµÄÖáÏòλÖá£Í¨¹ýË«ÂÝÐýµãÀ©É¢º¯Êý(DH-PSF)ʵÏÖÈýάÄÉÃ×¶¨Î»ÊÇ»ùÓÚÒ»ÖÖ±»³ÆÎª×Ô³ÉÏñµÄ ÏÖÏó¡£DH-PSFÊÇÒ»ÖÖÈýά¹âѧÏìÓ¦£¬¾ßÓÐËæÀë½¹Á¿²»¶ÏÐýתµÄÔ²Ðβ»¶Ô³Æºá½ØÃæÂÖÀª£¬Èç ͼ2Ëùʾ¡£Ë«ÂÝÐýµãÀ©É¢º¯ÊýÖ÷Ҫͨ¹ýλÓÚÀ¸Ç¶û-¸ß˹(Laguerre-Gauss,¼ò¼ÇΪLG) Ä£Ê½Æ½ÃæÉÏÌØ¶¨Ö±ÏßÉϵÄLG¹âÊøÄ£Ê½µÄÏßÐÔµþ¼Ó¹¹³É´øÓÐÐýתºÍËõ·ÅµÄ×Ô³ÉÏñ¹âÊø£¬È» ºó½«×Ô³ÉÏñ¹âÊøµÄÒ»¸öºá½ØÃæÖеĸ´ºÏ³¡×÷Ϊ¹âѧģ¿éµÄ¹âѧ´«µÝº¯Êý£¬ÄÇô£¬¹âѧģ¿é µÄ´«µÝº¯Êý¾ÍÊÇË«ÂÝÐýµãÀ©É¢º¯Êý¡£¸ÃÀ¸Ç¶û-¸ß˹¹âÊøÄ£Ê½Îª
ȨÀûÒªÇó
1.Ò»ÖÖ´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñ·½·¨£¬ÆäÌØÕ÷ÔÚÓÚ£¬°üÀ¨ÏÂÊö²½Öè ´´½¨¾ßÓÐË«ÂÝÐýµãÀ©É¢º¯ÊýºÍÀë½¹¹âÕ¤¶à½×³ÉÏñÐÔÖʵĹâѧģ¿é£» ͨ¹ýËùÊö¹âѧģ¿é¶Ô´ý²â·Ö×Ó½øÐгÉÏñ£¬»ñµÃ´ý²â·Ö×ÓµÄË«ÂÝÐýͼÏñ£» ͨ¹ýËùÊöË«ÂÝÐýͼÏñÖÐË«ÂÝÐýÅÔ°êµÄÖеãÔÚ³ÉÏñÃæÉϵÄλÖÃÈ·¶¨´ý²â·Ö×ӵĺáÏòλÖã» ͨ¹ýËùÊöË«ÂÝÐýͼÏñÖÐË«ÂÝÐýÅÔ°êµÄÖÐÐÄÁ¬ÏßµÄÐýת½Ç¶È¼°ËùÊöË«ÂÝÐýÅÔ°êµÄÖеãÔÚ³ÉÏñÃæÉϵÄλÖÃÈ·¶¨´ý²â·Ö×ÓµÄÖáÏòλÖá£
2.ÈçȨÀûÒªÇóIËùÊöµÄ·½·¨£¬ÆäÌØÕ÷ÔÚÓÚ£¬ËùÊö¹âѧģ¿éµÄË«ÂÝÐýµãÀ©É¢º¯Êýͨ¹ýÏÂÊö·½·¨ÊµÏÖ Í¨¹ýλÓÚÀ¸Ç¶û-¸ßË¹Ä£Ê½Æ½ÃæÉÏÌØ¶¨Ö±ÏßÉϵÄÀ¸Ç¶û-¸ß˹¹âÊøÄ£Ê½µÄÏßÐÔµþ¼Ó¹¹³É´øÓÐÐýתºÍËõ·ÅµÄ×Ô³ÉÏñ¹âÊø£» ½«×Ô³ÉÏñ¹âÊøµÄÒ»¸öºá½ØÃæÖеĸ´ºÏ¹â³¡×÷ΪËùÊö¹âѧģ¿éµÄ¹âѧ´«µÝº¯Êý£¬Ê¹ËùÊö¹âѧģ¿é¾ßÓÐË«ÂÝÐýµãÀ©É¢º¯Êý¡£
3.ÈçȨÀûÒªÇó2ËùÊöµÄ·½·¨£¬ÆäÌØÕ÷ÔÚÓÚ£¬ËùÊöÀ¸Ç¶û-¸ß˹¹âÊøÄ£Ê½Îª
4.ÈçȨÀûÒªÇó3ËùÊöµÄ·½·¨£¬ÆäÌØÕ÷ÔÚÓÚ£¬ËùÊö¹âѧģ¿éµÄÏàλº¯ÊýΪ ¢Ùh_¢Ùdb+¢Ùg ÆäÖУ¬CdbΪËùÊöÎåÖÖÀ¸Ç¶û-¸ß˹¹âÊøÄ£Ê½µÈÈ¨ÖØµþ¼ÓºóÐγɵĸ´Õñ·ùµÄÏàλ£»
5.ÈçȨÀûÒªÇó4ËùÊöµÄÍò·¨ÆäÌØÕ÷ÔÚÓÚ£¬ËùÊö¹âѧģ¿éΪ²ÉÓÃ΢ϸ¼Ó¹¤¼¼ÊõÖÆ×÷µÄÏàλƬ»ò²ÉÓÿռä¹âµ÷ÖÆÆ÷ʵÏÖ¡£
6.Ò»ÖÖÓÃÓÚ´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñµÄ¹âѧ×é¼þ£¬ÆäÌØÕ÷ÔÚÓÚ£¬°üÀ¨Ñعâ·´«Êä·½ÏòÒÀ´ÎÉèÖÃµÄ µÚһ͸¾µ£¬ÓÃÓÚ½«´ý²â·Ö×Ó·¢³öµÄ¹âÊø½øÐÐ×¼Ö±£» ¹âѧģ¿é£¬¾ßÓÐË«ÂÝÐýµãÀ©É¢º¯ÊýºÍÀë½¹¹âÕ¤¶à½×³ÉÏñÐÔÖÊ£¬ÓÃÓÚ½«ËùÊö¹âÊø×ª»»Îª¾ßÓÐË«ÂÝÐý¼°¶à½×³ÉÏñÐÔÖʵijÉÏñ¹âÊø£» µÚ¶þ͸¾µ£¬ÓÃÓÚ½«ËùÊö³ÉÏñ¹âÊøÊä³öÒÔÓÃÓÚ³ÉÏñ¡£
7.ÈçȨÀûÒªÇó6ËùÊöµÄ¹âѧ×é¼þ£¬ÆäÌØÕ÷ÔÚÓÚ£¬ËùÊö¹âѧģ¿éµÄÏàλº¯ÊýΪ
8.¡ªÖÖ´ó¾°É·Ö±æÓ«¹âÏÔ΢³ÉÏñ̽²âϵͳ£¬ÆäÌØÕ÷ÔÚÓÚ£¬°üÀ¨Ñعâ·´«Êä·½ÏòÒÀ´ÎÉèÖÃµÄ Ì½²âÎï¾µ£¬ÓÃÓÚ½ÓÊÕº¬Óдý²â·Ö×Ó·¢³öµÄÓ«¹âµÄ¹âÊø£» ÂË¹âÆ¬£¬ÓÃÓÚ¶ÔËùÊö¹âÊø½øÐÐÂ˲¨²¢Êä³öËùÊöÓ«¹â£» ˫ɫ¾µ£¬ÓÃÓÚ¶ÔËùÊöÓ«¹â½øÐз´É䣻 ¹Ü¾µ£¬ÓÃÓÚ½«·´ÉäµÄÓ«¹â¾Û½¹²¢Ïò³ÉÏñ×é¼þÊä³ö£» ³ÉÏñ×é¼þ£¬²ÉÓÃȨÀûÒªÇó6»ò7ËùÊöµÄ¹âѧ×é¼þ£¬ÓÃÓÚ½«ËùÊöÓ«¹âת»»Îª¾ßÓÐË«ÂÝÐý¼°¶à½×³ÉÏñÐÔÖʵijÉÏñ¹âÊø£» ̽²âÆ÷£¬ÓÃÓÚ½ÓÊÕËùÊö³ÉÏñ¹âÊø²¢½øÐÐË«ÂÝÐý¼°¶à½×³ÉÏñ¡£
9.ÈçȨÀûÒªÇó8ËùÊöµÄϵͳ£¬ÆäÌØÕ÷ÔÚÓÚ£¬ËùÊö¹âѧ×é¼þÖеĹâѧģ¿éΪͨ¹ý΢ϸ¼Ó¹¤¼¼ÊõÖÆ×÷µÄÏàλƬ¡£
10.ÈçȨÀûÒªÇó8ËùÊöµÄϵͳ£¬ÆäÌØÕ÷ÔÚÓÚ£¬ËùÊö¹âѧ×é¼þÖеĹâѧģ¿éΪ¿Õ¼ä¹âµ÷ÖÆÆ÷£¬ËùÊöϵͳ»¹°üÀ¨ Æ«ÕñƬ£¬Î»ÓÚËùÊö˫ɫ¾µºÍ¹Ü¾µÖ®¼ä£¬ÓÃÓÚ½«ËùÊöÓ«¹âת»»ÎªÊÊÓÃÓÚËùÊö¿Õ¼ä¹âµ÷ÖÆÆ÷µÄÏ߯«Õñ¹â¡£
È«ÎÄÕªÒª
±¾·¢Ã÷ÊÊÓÃÓÚÏÔ΢³ÉÏñ¼¼ÊõÁìÓò£¬ÌṩÁËÒ»ÖÖ´ó¾°ÉîÈýάÄÉÃ×·Ö±æ³ÉÏñ·½·¨£¬°üÀ¨ÏÂÊö²½Öè´´½¨¾ßÓÐË«ÂÝÐýµãÀ©É¢º¯ÊýºÍÀë½¹¹âÕ¤¶à½×³ÉÏñÐÔÖʵĹâѧģ¿é£»Í¨¹ý¹âѧģ¿é¶Ô´ý²â·Ö×Ó½øÐгÉÏñ£¬»ñµÃË«ÂÝÐýͼÏñ£»Í¨¹ýË«ÂÝÐýͼÏñÖÐË«ÂÝÐýÅÔ°êµÄÖеãµÄλÖÃÈ·¶¨´ý²â·Ö×ӵĺáÏòλÖã»Í¨¹ýË«ÂÝÐýͼÏñÖÐË«ÂÝÐýÅÔ°êµÄÖÐÐÄÁ¬ÏßµÄÐýת½Ç¶È¼°Ë«ÂÝÐýÅÔ°êµÄÖеãλÖÃÈ·¶¨´ý²â·Ö×ÓµÄÖáÏòλÖᣱ¾·¢Ã÷½«Ë«ÂÝÐýµãÀ©É¢º¯Êý¼°Àë½¹¹âÕ¤¶à½×³ÉÏñµÄË«ÖØÐ§Ó¦Ïà½áºÏ£¬¼ÈÀ©´óÁ˾°ÉÓÖÌá¸ßÁË·Ö±æÂÊ£¬¸Ã·½·¨¿ÉÓÃÓÚÍêÕûϸ°ûÄÚÈÎÒâÉî¶ÈÑÇϸ°ûµÄ¶¯Ì¬·¶Î§³ÉÏñ£¬¿É»ñµÃ¶à¸öÔ˶¯·Ö×ӵĶ¯Ì¬¹¦ÄÜͼÏñ£¬¶ÔÓÚÔÚ¸ü¸ßˮƽÉÏÈÏʶÑÇϸ°û½á¹¹Óëϸ°û¹¦Äܱ仯µÄ¹ØÏµºÍ¹æÂɾßÓÐÖØÒªÒâÒå¡£
Îĵµ±àºÅG01N21/64GK102980875SQ20121046780
¹«¿ªÈÕ2013Äê3ÔÂ20ÈÕ ÉêÇëÈÕÆÚ2012Äê11ÔÂ19ÈÕ ÓÅÏÈȨÈÕ2012Äê11ÔÂ19ÈÕ
·¢Ã÷ÕßÓÚ±ó, ³Âµ¤ÄÝ, Å£º©±¿, Àîºã ÉêÇëÈË:ÉîÛÚ´óѧ